Nature of the parasitic chemistry during AlGaInN OMVPE
Creighton, J.Randall, Wang, George T., Breiland, William G., Coltrin, Michael E.
Published in Journal of crystal growth (01.01.2004)
Published in Journal of crystal growth (01.01.2004)
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Journal Article
Conference Proceeding
In situ reflectance monitoring of epitaxial growth
Breiland, W.G.
Published in 2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) (2000)
Published in 2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) (2000)
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Conference Proceeding
Kinetics of the reactions of HSiCl with SiH4 and SiH2Cl2
Ho, Pauline, Breiland, William G., Carr, Robert W.
Published in Chemical physics letters (19.12.1986)
Published in Chemical physics letters (19.12.1986)
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Journal Article
Temperature dependence of the reactivity of OH(X2Π) with oxidized silicon nitride and PMMA film surfaces
FISHER, E. R, HO, P, BREILAND, W. G, BUSS, R. J
Published in Journal of physical chemistry (1952) (07.10.1993)
Published in Journal of physical chemistry (1952) (07.10.1993)
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Journal Article
Laser studies of the reactivity of NH(X3Σ-) with the surface of silicon nitride
FISHER, E. R, HO, P, BREILAND, W. G, BUSS, R. J
Published in Journal of physical chemistry (1952) (26.11.1992)
Published in Journal of physical chemistry (1952) (26.11.1992)
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Journal Article