Si MOSFET fabrication using focused ion beams
Kubena, R.L., Lee, J.Y.-M., Jullens, R.A., Brault, R.G., Middleton, P.L., Stevens, E.H.
Published in IEEE transactions on electron devices (01.09.1984)
Published in IEEE transactions on electron devices (01.09.1984)
Get full text
Journal Article
VIA-1 focused-ion-beam processes for device fabrication
Kubena, R.L., Anderson, C.L., Seliger, R.L., Brault, R.G., Miller, L.J.
Published in IEEE transactions on electron devices (01.10.1981)
Published in IEEE transactions on electron devices (01.10.1981)
Get full text
Journal Article
Si MOSFET fabrication using focused ion beams
Kubena, R.L., Lee, J.Y., Jullens, R.A., Brault, R.G., Middleton, P.L., Stevens, E.H.
Published in 1983 International Electron Devices Meeting (1983)
Published in 1983 International Electron Devices Meeting (1983)
Get full text
Conference Proceeding