Remote wireless control of an enzymatic biofuel cell implanted in a rabbit for 2 months
El Ichi-Ribault, Sarra, Alcaraz, Jean-Pierre, Boucher, François, Boutaud, Bertrand, Dalmolin, Renzo, Boutonnat, Jean, Cinquin, Philippe, Zebda, Abdelkader, Martin, Donald K.
Published in Electrochimica acta (10.04.2018)
Published in Electrochimica acta (10.04.2018)
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Journal Article
Micro Blood Pressure Energy Harvester for Intracardiac Pacemaker
Deterre, Martin, Lefeuvre, Elie, Yanan Zhu, Woytasik, Marion, Boutaud, Bertrand, Dal Molin, Renzo
Published in Journal of microelectromechanical systems (01.06.2014)
Published in Journal of microelectromechanical systems (01.06.2014)
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Journal Article
Combined analysis methods for investigating titanium and nickel surface contamination after plasma deep etching
Ettouri, Rim, Tillocher, Thomas, Lefaucheux, Philippe, Boutaud, Bertrand, Fernandez, Vincent, Fairley, Neal, Cardinaud, Christophe, Girard, Aurélie, Dussart, Rémi
Published in Surface and interface analysis (01.02.2022)
Published in Surface and interface analysis (01.02.2022)
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Journal Article
The effect of SF 6 addition in a Cl 2 /Ar inductively coupled plasma for deep titanium etching
Laudrel, E, Tillocher, T, Meric, Y, Lefaucheux, P, Boutaud, B, Dussart, R
Published in Journal of micromechanics and microengineering (01.05.2018)
Published in Journal of micromechanics and microengineering (01.05.2018)
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Journal Article
Alternated process for the deep etching of titanium
Tillocher, T, Lefaucheux, P, Boutaud, B, Dussart, R
Published in Journal of micromechanics and microengineering (01.07.2014)
Published in Journal of micromechanics and microengineering (01.07.2014)
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Journal Article
Titanium isotropic and anisotropic etching for MEMS applications
Ettouri, Rim, Tillocher, Thomas, Lefaucheux, Philippe, Boutaud, Bertrand, Phung, Jodie, Philippe, Hadrien, Dussart, Remi
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)
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