The effect of SF6 addition in a Cl2/Ar inductively coupled plasma for deep titanium etching
Laudrel, E, Tillocher, T, Meric, Y, Lefaucheux, P, Boutaud, B, Dussart, R
Published in Journal of micromechanics and microengineering (08.03.2018)
Published in Journal of micromechanics and microengineering (08.03.2018)
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Journal Article
Alternated process for the deep etching of titanium
Tillocher, T, Lefaucheux, P, Boutaud, B, Dussart, R
Published in Journal of micromechanics and microengineering (01.07.2014)
Published in Journal of micromechanics and microengineering (01.07.2014)
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Journal Article
Mechanical characterization of bulk-micromachined Ti membranes by microbending and by vibrometry
Becan, G., Bosseboeuf, A., Phung, J., Philippe, H., Boutaud, B., Woytasik, M., Coste, P., Lefeuvre, E.
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)
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Conference Proceeding
Fabrication and mechanical study of a titanium micro-membrane for in vivo pressure monitoring
Becan, G., Philippe, H., Phung, J., Laudrel, E., Boutaud, B., Isac, N., Woytasik, M., Lefeuvre, E.
Published in 2020 14th International Symposium on Medical Information Communication Technology (ISMICT) (01.05.2020)
Published in 2020 14th International Symposium on Medical Information Communication Technology (ISMICT) (01.05.2020)
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Conference Proceeding
Mechanical comparison between two titanium micro membranes for in vivo pressure monitoring
Becan, G., Phung, J., Philippe, H., Bosseboeuf, A., Coste, P., Laudrel, E., Boutaud, B., Woytasik, M., Lefeuvre, E.
Published in 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (01.06.2020)
Published in 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (01.06.2020)
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Conference Proceeding
Micromachined piezoelectric spirals and ultra-compliant packaging for blood pressure energy harvesters powering medical implants
Deterre, M., Lefeuvre, E., Zhu, Y., Woytasik, M., Bosseboeuf, A., Boutaud, B., Dal Molin, R.
Published in 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2013)
Published in 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2013)
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Conference Proceeding
Journal Article
The effect of SF 6 addition in a Cl 2 /Ar inductively coupled plasma for deep titanium etching
Laudrel, E, Tillocher, T, Meric, Y, Lefaucheux, P, Boutaud, B, Dussart, R
Published in Journal of micromechanics and microengineering (01.05.2018)
Published in Journal of micromechanics and microengineering (01.05.2018)
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Journal Article
Energy harvesting devices as long lasting power sources for the next generation pacemakers
Lefeuvre, E., Risquez, S., Woytasik, M., Deterre, M., Boutaud, B., Dal Molin, R.
Published in 2013 25th International Conference on Microelectronics (ICM) (01.12.2013)
Published in 2013 25th International Conference on Microelectronics (ICM) (01.12.2013)
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Conference Proceeding
Evaluation of Optical Interferometry for Thickness Uniformity Control of Parylene HT Coating on Titanium Substrates
Riahi, S., Becan, G., Ammar, M., Bosseboeuf, A., Laourine, F., Boutaud, B., Bouville, D., Harouri, A., Coste, P., Lefeuvre, E.
Published in 2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (02.06.2024)
Published in 2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (02.06.2024)
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Conference Proceeding
Energy harvesting system for cardiac implant applications
Deterre, M., Boutaud, B., Dalmolin, R., Boisseau, S., Chaillout, J-J, Lefeuvre, E., Dufour-Gergam, E.
Published in 2011 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) (01.05.2011)
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Published in 2011 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) (01.05.2011)
Conference Proceeding