Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors
Brunet, M., Kotb, H. Mafhoz, Bouscayrol, L., Scheid, E., Andrieux, M., Legros, C., Schamm-Chardon, S.
Published in Thin solid films (01.06.2011)
Published in Thin solid films (01.06.2011)
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Journal Article
Final capping passivation layers for long-life microsensors in real fluids
Vanhove, E., Tsopéla, A., Bouscayrol, L., Desmoulin, A., Launay, J., Temple-Boyer, P.
Published in Sensors and actuators. B, Chemical (01.03.2013)
Published in Sensors and actuators. B, Chemical (01.03.2013)
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Journal Article
Development of polysilicon devices for microfluidic thermal instrumentation
Camps, T., Tasselli, J., Lubin, J., Lagrange, D., Bouscayrol, L., Marty, A.
Published in Sensors and actuators. A. Physical. (15.01.2013)
Published in Sensors and actuators. A. Physical. (15.01.2013)
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Journal Article
Charging-Effects in RF capacitive switches influence of insulating layers composition
Lamhamdi, M., Guastavino, J., Boudou, L., Segui, Y., Pons, P., Bouscayrol, L., Plana, R.
Published in Microelectronics and reliability (01.09.2006)
Published in Microelectronics and reliability (01.09.2006)
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Journal Article
Conference Proceeding
Real-time in situ monitoring of wet thermal oxidation for precise confinement in VCSELs
Almuneau, G, Bossuyt, R, Collière, P, Bouscayrol, L, Condé, M, Suarez, I, Bardinal, V, Fontaine, C
Published in Semiconductor science and technology (01.10.2008)
Published in Semiconductor science and technology (01.10.2008)
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Journal Article
Structure-induced effects on the selective wet thermal oxidation of digital AlxGa1–xAs alloys
Suarez, I., Condé, M., Bouscayrol, L., Fontaine, C., Almuneau, G.
Published in Journal of materials research (01.11.2008)
Published in Journal of materials research (01.11.2008)
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Journal Article
Plasma-enhanced chemical vapor deposition of silicon oxynitride for micromachined millimeter-wave devices
Saadaoui, M, Peyrou, D, Achkar, H, Pennec, F, Bouscayrol, L, Rousset, B, Boyer, P T, Scheid, E, Pons, P, Plana, R
Published in Journal of micromechanics and microengineering (01.03.2008)
Published in Journal of micromechanics and microengineering (01.03.2008)
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Journal Article
Corrigendum to “Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors” [Thin Solid Films 519 (2011) 5638–5644]
Brunet, M., Kotb, H. Mahfoz, Bouscayrol, L., Scheid, E., Andrieux, M., Legros, C., Schamm-Chardon, S.
Published in Thin solid films (29.02.2012)
Published in Thin solid films (29.02.2012)
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Journal Article
Structure-induced effects on the selective wet thermal oxidation of digital Al x Ga 1– x As alloys
Suarez, I., Condé, M., Bouscayrol, L., Fontaine, C., Almuneau, G.
Published in Journal of materials research (01.11.2008)
Published in Journal of materials research (01.11.2008)
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Journal Article
A comprehensive study for dielectric charging process in silicon nitride films for RF MEMS switches using Kelvin Probe Microscopy
Zaghloul, U., Belarni, A., Coccetti, F., Papaioannou, G.J., Bouscayrol, L., Pons, P., Plana, R.
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2009)
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2009)
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Conference Proceeding
AlOx/GaAs high contrast grating mirrors for mid infrared VCSELs
Laaroussi, Y., Gauthier-Lafaye, O., Bouscayrol, L., Fontaine, C., Cerutti, L., Taliercio, T., Chevallier, C., Genty, F., Fressengeas, N., Almuneau, G.
Published in 2012 14th International Conference on Transparent Optical Networks (ICTON) (01.07.2012)
Published in 2012 14th International Conference on Transparent Optical Networks (ICTON) (01.07.2012)
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Conference Proceeding
Light emission from LPCVD silicon nanocrystals: the effect of composition and annealing
Koukos, K., Bedel-Pereira, E., Bouscayrol, L., Scheid, E., Gauthier-Lafaye, O., Bonnefont, S., Sarrabayrouse, G., Lozes-Dupuy, F.
Published in 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (01.06.2007)
Published in 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (01.06.2007)
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Conference Proceeding