Nanoimprint lithography for a large area pattern replication
Lebib, A., Chen, Y., Bourneix, J., Carcenac, F., Cambril, E., Couraud, L., Launois, H.
Published in Microelectronic engineering (01.05.1999)
Published in Microelectronic engineering (01.05.1999)
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Conference Proceeding
Absorber edge effect in proximity X-ray lithography
Simon, G., Chen, Y., Haghiri-Gosnet, A.M., Decanini, D., Bourneix, J., Rousseaux, F., Launois, H.
Published in Microelectronic engineering (01.03.1998)
Published in Microelectronic engineering (01.03.1998)
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Conference Proceeding
Infrared spectroscopy of hydrogenated and chlorinated amorphous silicon
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Paper
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Crystal growth method under microgravity conditions
Rodot, H., Hamidi, M., Bourneix, J., Okhotin, A.S., Zoubridski, I.A., Kriapov, V.T., Markov, E.V.
Published in Journal of crystal growth (01.01.1981)
Published in Journal of crystal growth (01.01.1981)
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