Enhanced Sensitivity of SAW-Based Pirani Vacuum Pressure Sensor
Singh, K J, Elmazria, O, Sarry, F, Nicolay, P, Ghoumid, K, Belgacem, B, Mercier, D, Bounouar, J
Published in IEEE sensors journal (01.06.2011)
Published in IEEE sensors journal (01.06.2011)
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Journal Article
Saw-Pirani vacuum sensor with a new functioning mode and a fast response time
Mercier, D., Bordel, G., Brunet-Manquat, P., Verrun, S., Elmazria, O., Sarry, F., Belgacem, B., Bounouar, J.
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
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Conference Proceeding