Integrated microfluidic–microoptical systems fabricated by dry etching of soda-lime glass
Vieillard, Julien, Mazurczyk, Radoslaw, Boum, Lynda-Lawrence, Bouchard, Aude, Chevolot, Yann, Cremillieu, Pierre, Hannes, Benjamin, Krawczyk, Stanislas
Published in Microelectronic engineering (01.02.2008)
Published in Microelectronic engineering (01.02.2008)
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