Study of SF6/N2O Microwave Plasma for Surface Texturing of Multicrystalline (${<}150$ μm) Solar Substrates
Chan, Boon Teik, Kunnen, Eddy, Uhlig, Matthias, Marneffe, Jean-Francois de, Xu, Kaidong, Boullart, Werner, Rau, Bernd, Poortmans, Jef
Published in Jpn J Appl Phys (01.10.2012)
Published in Jpn J Appl Phys (01.10.2012)
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Journal Article
Patterning of 25 nm Contact Holes at 90 nm Pitch: Combination of Line/Space Double Exposure Immersion Lithography and Plasma-Assisted Shrink Technology
Marneffe, Jean-François de, Lazzarino, Frédéric, Goossens, Danny, Vandervorst, Alain, Richard, Olivier, Shamiryan, Denis, Xu, Kaidong, Truffert, Vincent, Boullart, Werner
Published in Japanese Journal of Applied Physics (01.08.2011)
Published in Japanese Journal of Applied Physics (01.08.2011)
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Journal Article
28 nm pitch of line/space pattern transfer into silicon substrates with chemo-epitaxy Directed Self-Assembly (DSA) process flow
BOON TEIK CHAN, TAHARA, Shigeru, PARNELL, Doni, DELGADILLO, Paulina A. Rincon, GRONHEID, Roel, DE MARNEFFE, Jean-François, KAIDONG XU, NISHIMURA, Eiichi, BOULLART, Werner
Published in Microelectronic engineering (01.07.2014)
Published in Microelectronic engineering (01.07.2014)
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Conference Proceeding
Journal Article
Silicon Nano-Pillar Test Structures for Quantitative Evaluation of Wafer Drying Induced Pattern Collapse
Vos, Ingrid, Hellin, David, Vertommen, Johan, Demand, Marc, Boullart, Werner
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Journal Article
Study of ultrasound-assisted radio-frequency plasma discharges in n-dodecane
Camerotto, Elisabeth, Schepper, Peter De, Nikiforov, Anton Y, Brems, Steven, Shamiryan, Denis, Boullart, Werner, Leys, Christophe, Gendt, Stefan De
Published in Journal of physics. D, Applied physics (31.10.2012)
Published in Journal of physics. D, Applied physics (31.10.2012)
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Journal Article
Study of SF 6 /N 2 O Microwave Plasma for Surface Texturing of Multicrystalline (<150 µm) Solar Substrates
Chan, Boon Teik, Kunnen, Eddy, Uhlig, Matthias, Marneffe, Jean-Francois de, Xu, Kaidong, Boullart, Werner, Rau, Bernd, Poortmans, Jef
Published in Japanese Journal of Applied Physics (01.10.2012)
Published in Japanese Journal of Applied Physics (01.10.2012)
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Journal Article
Study of SF 6 /N 2 O Microwave Plasma for Surface Texturing of Multicrystalline (<150 µm) Solar Substrates
Chan, Boon Teik, Kunnen, Eddy, Uhlig, Matthias, Marneffe, Jean-Francois de, Xu, Kaidong, Boullart, Werner, Rau, Bernd, Poortmans, Jef
Published in Japanese Journal of Applied Physics (01.10.2012)
Published in Japanese Journal of Applied Physics (01.10.2012)
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Journal Article
Reactive Ion Etch of Si3N4 Spacers High Selective to Germanium
Altamirano, Efrain, Kunnen, Eddy, De Jaeger, Brice, Boullart, Werner
Published in ECS transactions (03.10.2008)
Published in ECS transactions (03.10.2008)
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Journal Article
Discovering Practical Use of Sensor Wafers in CCP Reactors
Milenin, Alexey, Demand, Marc, Boullart, Werner, Arleo, Paul
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Journal Article
Patterning of 25 nm Contact Holes at 90 nm Pitch: Combination of Line/Space Double Exposure Immersion Lithography and Plasma-Assisted Shrink Technology
Marneffe, Jean-Fran\{c}ois de, Lazzarino, Frédéric, Goossens, Danny, Vandervorst, Alain, Richard, Olivier, Shamiryan, Denis, Xu, Kaidong, Truffert, Vincent, Boullart, Werner
Published in Japanese Journal of Applied Physics (01.08.2011)
Published in Japanese Journal of Applied Physics (01.08.2011)
Get full text
Journal Article