Testing of a LIGA-microspectrometer for monitoring dissolved nickel concentration when etching nickel and its alloys in aqueous ferric chloride solutions
Allen, D.M., Almond, H.J.A., Boubal, D.
Published in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003 (2003)
Published in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003 (2003)
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