Efficient and low-damage nitrogen doping of graphene via plasma-based methods
Lin, Yu-Pu, Ksari, Younal, Aubel, Dominique, Hajjar-Garreau, Samar, Borvon, Gaël, Spiegel, Yohann, Roux, Laurent, Simon, Laurent, Themlin, Jean-Marc
Published in Carbon (New York) (01.04.2016)
Published in Carbon (New York) (01.04.2016)
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Journal Article
Hydrogenation of sputtered ZnO:Al layers for double side poly-Si/SiOx solar cells
Seron, Charles, Desrues, Thibaut, Jay, Frederic, Lanterne, Adeline, Torregrosa, Frank, Borvon, Gaël, Rafhay, Quentin, Kaminski, Anne, Dubois, Sébastien
Published in EPJ Photovoltaics (2022)
Published in EPJ Photovoltaics (2022)
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Journal Article
Hydrogenation of sputtered ZnO:Al layers for double side poly-Si/SiO x solar cells
Seron, Charles, Desrues, Thibaut, Jay, Frédéric, Lanterne, Adeline, Torregrosa, Frank, Borvon, Gaël, Rafhay, Quentin, Kaminski, Anne, Dubois, Sébastien
Published in EPJ Photovoltaics (2022)
Published in EPJ Photovoltaics (2022)
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Journal Article
Poly-Si/SiOx Passivating Contacts on Both Sides: A Versatile Technology For High Efficiency Solar Cells
Desrues, Thibaut, Lanterne, Adeline, Seron, Charles, Rousseau, Sylvain, Pihan, Etienne, Dubois, Sebastien, Borvon, Gael, Torregrosa, Frank, Roux, Laurent
Published in 2021 IEEE 48th Photovoltaic Specialists Conference (PVSC) (20.06.2021)
Published in 2021 IEEE 48th Photovoltaic Specialists Conference (PVSC) (20.06.2021)
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Conference Proceeding
Strain Modification of PECVD Nitride By Plasma Immersion Ion Implantation Processes
Lachal, Laurent, Plantier, Christophe, Torregrosa, Franck, Aubert, Cedric, Pedini, Jean-Michel, Borvon, Gael, Coig, Marianne, Milesi, Frederic, Niebojewski, Heimanu, Mazen, Frédéric
Published in ECS transactions (24.04.2020)
Published in ECS transactions (24.04.2020)
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Journal Article
Ex-situ Hydrogenation of Sputtered Transparent Conductive Oxide layers by Plasma Immersion Ion Implantation
Seron, Charles, Desrues, Thibaut, Oliveau, Camille, Rafhay, Quentin, Torregrosa, Frank, Borvon, Gael, Kaminski, Anne, Dubois, Sebastien
Published in 2020 47th IEEE Photovoltaic Specialists Conference (PVSC) (14.06.2020)
Published in 2020 47th IEEE Photovoltaic Specialists Conference (PVSC) (14.06.2020)
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Conference Proceeding
Front Cover: Plasma Process. Polym. 4-5/2006
Granier, Agnès, Borvon, Gael, Bousquet, Angélique, Goullet, Antoine, Leteinturier, Christiane, van der Lee, Arie
Published in Plasma processes and polymers (09.07.2006)
Published in Plasma processes and polymers (09.07.2006)
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Journal Article
Strain Modification of PECVD Nitride By Plasma Immersion Ion Implantation Processes
Lachal, Laurent, Plantier, Christophe, Torregrosa, Franck, Aubert, Cedric, Pedini, Jean-Michel, Borvon, Gael, Coig, Marianne, Milesi, Frederic, Niebojewski, Heimanu, Mazen, Frédéric
Published in Meeting abstracts (Electrochemical Society) (01.05.2020)
Published in Meeting abstracts (Electrochemical Society) (01.05.2020)
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Journal Article
Advantages and Challenges of Plasma Immersion Ion Implantation for Power Devices Manufacturing on Si, SiC and GaN using PULSION® Tool
Torregrosa, Frank, Spiegel, Yohann, Roux, Laurent, Sempere, Guillaume, Borvon, Gael, Wuebben, Thomas, Schustereder, Werner, Jelinek, Moriz, Morancho, Frederic, Godignon, Philippe, Zielinski, Marcin
Published in 2018 22nd International Conference on Ion Implantation Technology (IIT) (01.09.2018)
Published in 2018 22nd International Conference on Ion Implantation Technology (IIT) (01.09.2018)
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Conference Proceeding
Recent developments on PULSION® PIII tool: FinFET 3D doping, high temp implantation, III-V doping, contact and silicide improvement, & 450 mm
Torregrosa, Frank, Spiegel, Yohann, Duchaine, Julien, Michel, Thomas, Borvon, Gael, Roux, Laurent
Published in 2015 15th International Workshop on Junction Technology (IWJT) (01.06.2015)
Published in 2015 15th International Workshop on Junction Technology (IWJT) (01.06.2015)
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Conference Proceeding
Study of AsH3 Plasma Immersion Ion Implantation using PULSION
Duchaine, Julian, Torregrosa, Frank, Spiegel, Yohann, Borvon, Gael, Shu Qin, Yongjun Jeff Hu, McTeer, Allen
Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
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Conference Proceeding