Effect of Temperature on Pad Surface Contact Area in Chemical Mechanical Planarization
Jiao, Y., Zhuang, Y., Liao, X., Borucki, L. J., Naman, A., Philipossian, A.
Published in ECS solid state letters (20.07.2012)
Published in ECS solid state letters (20.07.2012)
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Journal Article
Deposition and etch processes: continuum film evolution in microelectronics
Cale, T.S., Rogers, B.R., Merchant, T.P., Borucki, L.J.
Published in Computational materials science (01.11.1998)
Published in Computational materials science (01.11.1998)
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Journal Article
A multiscale simulator for low pressure chemical vapor deposition
GOBBERT, M. K, MERCHANT, T. P, BORUCKI, L. J, CALE, T. S
Published in Journal of the Electrochemical Society (01.11.1997)
Published in Journal of the Electrochemical Society (01.11.1997)
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Journal Article
Cardiovascular responses to blockade of angiotensin and alpha-adrenergic receptors
Borucki, L J, Levenson, D, Hollenberg, N K
Published in American journal of physiology. Renal physiology (01.09.1978)
Published in American journal of physiology. Renal physiology (01.09.1978)
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Journal Article
Effect of Pad Micro-Texture on Frictional Force, Removal Rate, and Wafer Topography during Copper CMP Process
Zhuang, Yun, Liao, Xiaoyan, Borucki, Leonard J., Theng, Siannie, Wei, Xiaomin, Ashizawa, Toranosuke, Philipossian, Ara
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Journal Article
Fluid Pressures and Pad Topography in Chemical Mechanical Polishing
Borucki, Leonard J., Ng, Sum Huan, Danyluk, Steven
Published in Journal of the Electrochemical Society (2005)
Published in Journal of the Electrochemical Society (2005)
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Journal Article
Response to saralasin and angiotensin's role in essential and renal hypertension
Hollenberg, N K, Williams, G H, Adams, D F, Moore, T, Brown, C, Borucki, L J, Leung, F, Bavli, S, Solomon, H S, Passan, D, Dluhy, R
Published in Medicine (Baltimore) (01.03.1979)
Published in Medicine (Baltimore) (01.03.1979)
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Journal Article
A theory of pad conditioning for chemical-mechanical polishing
BORUCKI, Leonard J, WITELSKI, Thomas, PLEASE, Colin, KRAMER, Peter R, SCHWENDEMAN, Donald
Published in Journal of engineering mathematics (01.09.2004)
Published in Journal of engineering mathematics (01.09.2004)
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Journal Article
Multiple scale integrated modeling of deposition processes
Merchant, Tushar P, Gobbert, Matthias K, Cale, Timothy S, Borucki, Leonard J
Published in Thin solid films (17.04.2000)
Published in Thin solid films (17.04.2000)
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Journal Article
Topography simulation for the virtual wafer fab
Cale, Timothy S., Merchant, Tushar P., Borucki, Leonard J., Labun, Andrew H.
Published in Thin solid films (17.04.2000)
Published in Thin solid films (17.04.2000)
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Journal Article