Line and via voiding measurements in damascene copper lines using metal illumination
Borden, P.G., Li, J.P., Smith, S.R., Diebold, A.C., Chism, W.W.
Published in IEEE transactions on semiconductor manufacturing (01.08.2003)
Published in IEEE transactions on semiconductor manufacturing (01.08.2003)
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Journal Article
Conference Proceeding
A novel method to form nano-gridlines on textured CZ silicon wafers
Li Xu, Borden, P.G., Stewart, M.P., Paak, S.
Published in 2009 34th IEEE Photovoltaic Specialists Conference (PVSC) (01.06.2009)
Published in 2009 34th IEEE Photovoltaic Specialists Conference (PVSC) (01.06.2009)
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Conference Proceeding
Benefits of real-time, in situ particle monitoring in production medium current implantation
Borden, P.G., Larson, L.A.
Published in IEEE transactions on semiconductor manufacturing (01.11.1989)
Published in IEEE transactions on semiconductor manufacturing (01.11.1989)
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Journal Article
Studies of GaAs and AlGaAs layers grown by OM-VPE
Saxena, R.R., Cooper, C.B., Ludowise, M.J., Hikido, S., Sardi, V.M., Borden, P.G.
Published in Journal of crystal growth (01.01.1981)
Published in Journal of crystal growth (01.01.1981)
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Journal Article
The fabrication and performance of organometallic vapor phase epitaxial AlxGa1-xAs/GaAs concentrator solar cells
Gregory, P.E., Borden, P.G., Ludowise, M.J., Owen, R.J., Kaminar, N., Larue, R.A., Boettcher, R.J.
Published in Solar cells (01.06.1982)
Published in Solar cells (01.06.1982)
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Journal Article