Identification and management of diffusion pathways in polysilicon encapsulation for MEMS devices
Bongsang Kim, Candler, R.N., Melamud, R., Yoneoka, S., Hyung Kyu Lee, Yama, G., Kenny, T.W.
Published in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (01.01.2008)
Published in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (01.01.2008)
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Conference Proceeding
Frequency stability of wafer-scale encapsulated MEMS resonators
Bongsang Kim, Candler, R.N., Hopcroft, M., Agarwal, M., Woo-Tae Park, Kenny, T.W.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Hermeticity and diffusion investigation in polysilicon film encapsulationfor microelectromechanical systems
Kim, Bongsang, Candler, Rob N., Melamud, Renata, Hopcroft, Matthew A., Yoneoka, Shingo, Lee, Hyung Kyu, Agarwal, Manu, Chandorkar, Saurabh A., Yama, Gary, Kenny, Thomas W.
Published in Journal of applied physics (07.01.2009)
Published in Journal of applied physics (07.01.2009)
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Journal Article
Impact of miniaturization on the current handling of electrostatic MEMS resonators
Agarwal, M., Mehta, H., Candler, R.N., Chandorkar, S.A., Bongsang Kim, Hopcroft, M.A., Melamud, R., Bahl, G., Yama, G., Kenny, T.W., Murmann, B.
Published in 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2007)
Published in 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2007)
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Conference Proceeding
Scaling of amplitude-frequency-dependence nonlinearitiesin electrostatically transduced microresonators
Agarwal, Manu, Mehta, Harsh, Candler, Robert N., Chandorkar, Saurabh A., Kim, Bongsang, Hopcroft, Matthew A., Melamud, Renata, Bahl, Gaurav, Yama, Gary, Kenny, Thomas W., Murmann, Boris
Published in Journal of applied physics (02.10.2007)
Published in Journal of applied physics (02.10.2007)
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Journal Article
Suggestion on the Practical Human Robot Interaction Design for the Autonomous Driving Disinfection Robot
Kim, Bongsang, Kim, Nahyun, Kang, Insung, Sim, Myeonghun, Seok, Jungeun, Lim, Sehyun, Moon, Heechang
Published in 2021 21st International Conference on Control, Automation and Systems (ICCAS) (12.10.2021)
Published in 2021 21st International Conference on Control, Automation and Systems (ICCAS) (12.10.2021)
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Conference Proceeding
Impact of slot location on thermoelastic dissipation in micromechanical resonators
Candler, R.N., Hopcroft, M., Low, C.W., Chandorkar, S., Bongsang Kim, Varghese, M., Duwel, A., Kenny, T.W.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Advanced Compound Semiconductor and Silicon Fabrication Techniques for Next-Generation Solar Power Systems
Nielson, Gregory N., Okandan, Murat, Cruz-Campa, Jose L., Gupta, Vipin P., Resnick, Paul J., Sanchez, Carlos A., Paap, Scott M., Kim, Bongsang, Sweatt, William C., Lentine, Anthony L., Cederberg, Jeffrey G., Tauke-Pedretti, Anna, Jared, Bradley H., Anderson, Benjamin J., Biefeld, Robert M., Nelson, Jeffrey S.
Published in ECS transactions (15.03.2013)
Published in ECS transactions (15.03.2013)
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Journal Article
Thermal conductivity prediction of nanoscale phononic crystal slabs using a hybrid lattice dynamics-continuum mechanics technique
Reinke, Charles M., Kim, Bongsang, Olsson, Roy H., El-Kady, Ihab Fathy, Su, Mehmet F., Davis, Bruce L., Hussein, Mahmoud I., Leseman, Zayd C.
Published in AIP advances (01.01.2011)
Published in AIP advances (01.01.2011)
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Journal Article
Systems and methods for providing getters in microelectromechanical systems
Huang, Jeff Chunchieh, Lee, Daesung, Shin, Jongwoo, Kim, Bongsang, Jayaraman, Logeeswaran Veerayah
Year of Publication 02.04.2024
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Year of Publication 02.04.2024
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