Trends, demands and challenges in TCAD
Bork, Ingo, Moroz, Victor, Bomholt, Lars, Pramanik, Dipu
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2005)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2005)
Get full text
Journal Article
A Full 3D TCAD Simulation Study of Line-Width Roughness Effects in 65 nm Technology
Sponton, L., Bomholt, L., Pramanik, D., Fichtner, W.
Published in 2006 International Conference on Simulation of Semiconductor Processes and Devices (01.09.2006)
Published in 2006 International Conference on Simulation of Semiconductor Processes and Devices (01.09.2006)
Get full text
Conference Proceeding