Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200 mm wafers
Pouydebasque, Arnaud, Bridoux, Claudine, Jacquet, Fabrice, Moreau, Stephane, Sage, Eric, Saint-Patrice, Damien, Bouvier, Christophe, Kopp, Christophe, Marchand, Gilles, Bolis, Sebastien, Sillon, Nicolas, Vigier-Blanc, Emmanuelle
Published in Sensors and actuators. A. Physical. (01.12.2011)
Published in Sensors and actuators. A. Physical. (01.12.2011)
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Journal Article
Experimental Quantification of the Residual Stress of Thin Membrane Materials in MEMS Devices Using Point Deflection
Sofiane Soulimane, Arnaud Pouydebasque, Sébastien Bolis, Fabrice Jacquet, Claudine Bridoux, Florian Dupont, Christophe Poulain, Stéphane Moreau, Stephane Fanget
Published in 淡江理工學刊 (01.03.2014)
Published in 淡江理工學刊 (01.03.2014)
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Journal Article