Raman spectroscopy capabilities for advanced semiconductor technology devices
Nuytten, Thomas, Bogdanowicz, Janusz, Sergeant, Stefanie, Fleischmann, Claudia
Published in Applied physics letters (29.07.2024)
Published in Applied physics letters (29.07.2024)
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Journal Article
Electrical characterization of single nanometer-wide Si fins in dense arrays
Folkersma, Steven, Bogdanowicz, Janusz, Schulze, Andreas, Favia, Paola, Petersen, Dirch H, Hansen, Ole, Henrichsen, Henrik H, Nielsen, Peter F, Shiv, Lior, Vandervorst, Wilfried
Published in Beilstein journal of nanotechnology (2018)
Published in Beilstein journal of nanotechnology (2018)
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Journal Article
(Invited) Very Low Temperature Epitaxy of Group-IV Semiconductors for Use in FinFET, Stacked Nanowires and Monolithic 3D Integration
Porret, Clement, Hikavyy, Andriy Yakovitch, Gomez Granados, Juan Fernando, Baudot, Sylvain, Vohra, Anurag, Kunert, Bernardette, Douhard, Bastien, Bogdanowicz, Janusz, Schaekers, Marc, Kohen, David, Margetis, Joe, Tolle, John, Lima, Lucas, Sammak, Amir, Scappucci, Giordano, Rosseel, Erik, Langer, Robert, Loo, Roger
Published in ECS transactions (20.07.2018)
Published in ECS transactions (20.07.2018)
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Journal Article
Taming the Distribution of Light in Gate-All-Around Semiconductor Devices
Bogdanowicz, Janusz, Nuytten, Thomas, Gawlik, Andrzej, Sergeant, Stefanie, Oniki, Yusuke, Gowda, Pallavi Puttarame, Mertens, Hans, Charley, Anne-Laure
Published in Nano letters (31.01.2024)
Published in Nano letters (31.01.2024)
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Journal Article
Size-dependent optical properties of periodic arrays of semiconducting nanolines
Gawlik, Andrzej, Bogdanowicz, Janusz, Schulze, Andreas, Morin, Pierre, Misiewicz, Jan, Vandervorst, Wilfried
Published in Optics express (02.03.2020)
Published in Optics express (02.03.2020)
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Journal Article
Influence of the Emitter Shape on the Field-of-View in Atom Probe Tomography
Dialameh, Masoud, Ling, Yu-Ting, Bogdanowicz, Janusz, Zharinov, Vyacheslav S, Richard, Olivier, Vandervorst, Wilfried, Fleischmann, Claudia
Published in Microscopy and microanalysis (06.03.2024)
Published in Microscopy and microanalysis (06.03.2024)
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Journal Article
Reference-free x-ray fluorescence analysis with a micrometer-sized incident beam
Hönicke, Philipp, Wählisch, André, Unterumsberger, Rainer, Beckhoff, Burkhard, Bogdanowicz, Janusz, Charley, Anne-Laure, Mertens, Hans, Rochat, Névine, Hartmann, Jean-Michel, Giambacorti, Narciso
Published in Nanotechnology (08.07.2024)
Published in Nanotechnology (08.07.2024)
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Journal Article
Low‐Temperature Selective Growth of Heavily Boron‐Doped Germanium Source/Drain Layers for Advanced pMOS Devices
Porret, Clement, Vohra, Anurag, Nakazaki, Nobuya, Hikavyy, Andriy, Douhard, Bastien, Meersschaut, Johan, Bogdanowicz, Janusz, Rosseel, Erik, Pourtois, Geoffrey, Langer, Robert, Loo, Roger
Published in Physica status solidi. A, Applications and materials science (01.02.2020)
Published in Physica status solidi. A, Applications and materials science (01.02.2020)
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Journal Article
Low temperature epitaxial growth of Ge:B and Ge0.99Sn0.01:B source/drain for Ge pMOS devices: in-situ and conformal B-doping, selectivity towards oxide and nitride with no need for any post-epi activation treatment
Vohra, Anurag, Porret, Clement, Kohen, David, Folkersma, Steven, Bogdanowicz, Janusz, Schaekers, Marc, Tolle, John, Hikavyy, Andriy, Capogreco, Elena, Witters, Liesbeth, Langer, Robert, Vandervorst, Wilfried, Loo, Roger
Published in Japanese Journal of Applied Physics (01.04.2019)
Published in Japanese Journal of Applied Physics (01.04.2019)
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Journal Article
Advanced Raman Spectroscopy Using Nanofocusing of Light
Nuytten, Thomas, Bogdanowicz, Janusz, Hantschel, Thomas, Schulze, Andreas, Favia, Paola, Bender, Hugo, De Wolf, Ingrid, Vandervorst, Wilfried
Published in Advanced engineering materials (01.08.2017)
Published in Advanced engineering materials (01.08.2017)
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Journal Article
Electrical Contact Formation in Micro Four‐Point Probe Measurements
Folkersma, Steven, Bogdanowicz, Janusz, Petersen, Dirch H., Hansen, Ole, Henrichsen, Henrik H., Nielsen, Peter F., Shiv, Lior, Vandervorst, Wilfried
Published in Physica status solidi. A, Applications and materials science (01.03.2020)
Published in Physica status solidi. A, Applications and materials science (01.03.2020)
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Journal Article
Width‐Dependent Sheet Resistance of Nanometer‐Wide Si Fins as Measured with Micro Four‐Point Probe
Bogdanowicz, Janusz, Folkersma, Steven, Sergeant, Stefanie, Schulze, Andreas, Moussa, Alain, Petersen, Dirch H., Hansen, Ole, Henrichsen, Henrik H., Nielsen, Peter F., Vandervorst, Wilfried
Published in Physica status solidi. A, Applications and materials science (21.03.2018)
Published in Physica status solidi. A, Applications and materials science (21.03.2018)
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Journal Article
Low temperature epitaxial growth of Ge:B and Ge 0.99 Sn 0.01 :B source/drain for Ge pMOS devices: in-situ and conformal B-doping, selectivity towards oxide and nitride with no need for any post-epi activation treatment
Vohra, Anurag, Porret, Clement, Kohen, David, Folkersma, Steven, Bogdanowicz, Janusz, Schaekers, Marc, Tolle, John, Hikavyy, Andriy, Capogreco, Elena, Witters, Liesbeth, Langer, Robert, Vandervorst, Wilfried, Loo, Roger
Published in Japanese Journal of Applied Physics (01.04.2019)
Published in Japanese Journal of Applied Physics (01.04.2019)
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Journal Article
Potential sources of compositional inaccuracy in the atom probe tomography of In x Ga 1-x As
Cuduvally, Ramya, Morris, Richard J H, Ferrari, Piero, Bogdanowicz, Janusz, Fleischmann, Claudia, Melkonyan, Davit, Vandervorst, Wilfried
Published in Ultramicroscopy (01.03.2020)
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Published in Ultramicroscopy (01.03.2020)
Journal Article
Light absorption in conical silicon particles
Bogdanowicz, J, Gilbert, M, Innocenti, N, Koelling, S, Vanderheyden, B, Vandervorst, W
Published in Optics express (11.02.2013)
Published in Optics express (11.02.2013)
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