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Year of Publication 16.09.2004
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Year of Publication 18.07.2002
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Electroplated copper interconnection structure, process for making and electroplating bath
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Year of Publication 16.09.2004
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Year of Publication 16.09.2004
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Electroplated copper interconnection structure, process for making and electroplating bath
SEO SOONON, KWIETNIAK KEITH T, HORKANS WILMA JEAN, DELIGIANNI HARIKLIA, SIMON ANDREW H, CHUNG DEAN S, PARKS CHRISTOPHER C, LOCKE PETER S, FLUEGEL JAMES E, WALTON ERICK G, ANDRICACOS PANAYOTIS C, BOETTCHER STEVEN H
Year of Publication 16.09.2004
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Year of Publication 16.09.2004
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Copper vias in low-k technology
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Year of Publication 07.05.2002
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Year of Publication 20.03.2002
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Copper vias in low-k technology
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Year of Publication 24.07.2002
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Year of Publication 24.07.2002
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