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"Boessendoerfer, Ralf"
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"Boessendoerfer, Ralf"
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Method for manufacturing a microelectromechanical structure and microelectromechanical structure
by
Reinmuth, Jochen
,
Boessendoerfer
,
Ralf
Year of Publication
07.05.2024
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METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL STRUCTURE AND MICROELECTROMENCHANICAL STRUCTURE
by
Reinmuth, Jochen
,
Boessendoerfer
,
Ralf
Year of Publication
17.03.2022
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Micromechanical z-inertial sensor
by
Reinmuth, Jochen
,
Boessendoerfer
,
Ralf
,
Waldmann, Jan
Year of Publication
26.01.2021
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Verfahren zur Herstellung einer mikroelektromechanischen Struktur und mikroelektromechanische Struktur
by
Reinmuth, Jochen
,
Boessendoerfer
,
Ralf
Year of Publication
30.06.2022
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Method for producing micro-electro-mechanical structure and micro-electro-mechanical structure
by
REINMUTH JOCHEN
,
BOESSENDOERFER RALF
Year of Publication
25.03.2022
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Verfahren zur Herstellung einer mikroelektromechanischen Struktur und mikroelektromechanische Struktur
by
Reinmuth, Jochen
,
Boessendoerfer
,
Ralf
Year of Publication
10.03.2022
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Micromechanical component and method for producing a micromechanical component
by
Schatz, Frank
,
Eberspaecher, Alexander
,
Doessel, Kerrin
,
Schary, Timo
,
Riedrich-Moeller, Janine
,
Boessendoerfer
,
Ralf
,
Mihaljevic, Josip
,
Muchow, Joerg
Year of Publication
26.03.2024
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MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
by
SCHATZ, Frank
,
RIEDRICH-MOELLER, Janine
,
BOESSENDOERFER
,
Ralf
,
EBERSPAECHER, Alexander
,
SCHARY, Timo
,
DOESSEL, Kerrin
,
MUCHOW, Joerg
,
MIHALJEVIC, Josip
Year of Publication
11.10.2023
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MICROMECHANICAL Z-INERTIAL SENSOR
by
Reinmuth, Jochen
,
Boessendoerfer
,
Ralf
,
Waldmann, Jan
Year of Publication
09.05.2019
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Mikromechanische Vorrichtung und Verfahren zur Herstellung
by
Reinmuth, Jochen
,
Boessendoerfer
,
Ralf
,
Kuehnel, Matthias
Year of Publication
25.05.2023
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MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
by
Schatz, Frank
,
Eberspaecher, Alexander
,
Doessel, Kerrin
,
Schary, Timo
,
Riedrich-Moeller, Janine
,
Boessendoerfer
,
Ralf
,
Mihaljevic, Josip
,
Muchow, Joerg
Year of Publication
02.09.2021
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MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
by
SCHATZ, Frank
,
RIEDRICH-MOELLER, Janine
,
BOESSENDOERFER
,
Ralf
,
EBERSPAECHER, Alexander
,
SCHARY, Timo
,
DOESSEL, Kerrin
,
MUCHOW, Joerg
,
MIHALJEVIC, Josip
Year of Publication
21.07.2021
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Mikromechanischer z-Inertialsensor
by
Reinmuth, Jochen
,
Boessendoerfer
,
Ralf
,
Waldmann, Jan
Year of Publication
23.05.2019
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MICROMECHANICAL Z-INERTIAL SENSOR AND MANUFACTURING METHOD THEREOF
by
REINMUTH JOCHEN
,
BOESSENDOERFER RALF
,
WALDMANN JAN
Year of Publication
17.05.2019
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Mikromechanischer z-Inertialsensor
by
Reinmuth, Jochen
,
Boessendoerfer
,
Ralf
,
Waldmann, Jan
Year of Publication
09.05.2019
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Micromechanical component having a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure
by
REINMUTH JOCHEN
,
HATTASS MIRKO
,
BOESSENDOERFER RALF
,
FRANKE AXEL
Year of Publication
15.04.2014
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MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
by
SCHARY TIMO
,
MIHALJEVIC JOSIP
,
RIEDRICH-MOELLER JANINE
,
SCHATZ FRANK
,
BOESSENDOERFER RALF
,
MUCHOW JOERG
,
EBERSPAECHER ALEXANDER
,
DOESSEL KERRIN
Year of Publication
20.04.2021
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Mikromechanisches Bauelement mit einer Teststruktur zur Bestimmung der Schichtdicke einer Abstandsschicht und Verfahren zum Herstellen einer solchen Teststruktur
by
Franke, Axel
,
Reinmuth, Jochen
,
Boessendoerfer
,
Ralf
,
Hattass, Mirko
Year of Publication
29.03.2018
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MICROMECHANICAL COMPONENT HAVING A TEST STRUCTURE FOR DETERMINING THE LAYER THICKNESS OF A SPACER LAYER AND METHOD FOR MANUFACTURING SUCH A TEST STRUCTURE
by
REINMUTH JOCHEN
,
HATTASS MIRKO
,
BOESSENDOERFER RALF
,
FRANKE AXEL
Year of Publication
08.12.2011
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COMPONENTE MICROMECCANICO CON UNA STRUTTURA DI TEST PER DETERMINARE LO SPESSORE DI UNO STRATO DISTANZIALE E PROCEDIMENTO PER FABBRICARE UNA TALE STRUTTURA DI TEST
by
REINMUTH JOCHEN
,
HATTASS MIRKO
,
BOESSENDOERFER RALF
,
FRANKE AXEL
Year of Publication
03.12.2011
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