High-rate magnetron sputtering with hot target
Sidelev, Dmitrii V., Bleykher, Galina A., Krivobokov, Valeriy P., Koishybayeva, Zhanumgyl
Published in Surface & coatings technology (25.12.2016)
Published in Surface & coatings technology (25.12.2016)
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Journal Article
Chromium films deposition by hot target high power pulsed magnetron sputtering: Deposition conditions and film properties
Grudinin, Vladislav A., Bleykher, Galina A., Sidelev, Dmitrii V., Krivobokov, Valery P., Bestetti, Massimiliano, Vicenzo, Antonello, Franz, Silvia
Published in Surface & coatings technology (15.10.2019)
Published in Surface & coatings technology (15.10.2019)
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Journal Article
Hot target magnetron sputtering for ferromagnetic films deposition
Sidelev, Dmitrii V., Bleykher, Galina A., Grudinin, Vladislav A., Krivobokov, Valery P., Bestetti, Massimiliano, Syrtanov, Maxim S., Erofeev, Evgenii V.
Published in Surface & coatings technology (25.01.2018)
Published in Surface & coatings technology (25.01.2018)
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Journal Article
Deposition of Cr films by hot target magnetron sputtering on biased substrates
Sidelev, Dmitrii V., Bestetti, Massimiliano, Bleykher, Galina A., Krivobokov, Valery P., Grudinin, Vladislav A., Franz, Silvia, Vicenzo, Antonello, Shanenkova, Yuliya L.
Published in Surface & coatings technology (25.09.2018)
Published in Surface & coatings technology (25.09.2018)
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Journal Article
Ultra high fluence implantation of aluminum ions into CP–Ti
Ryabchikov, Alexander I., Shevelev, Alexey E., Sivin, Denis O., Bozhko, Irina A., Kashkarov, Egor B., Bleykher, Galina A., Stepanov, Igor B., Ivanova, Anna I.
Published in Journal of alloys and compounds (15.07.2019)
Published in Journal of alloys and compounds (15.07.2019)
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Journal Article
Magnetron Deposition of Cr Coatings with RF-ICP Assistance
Sidelev, Dmitrii V., Grudinin, Vladislav A., Zinkovskii, Konstantin A., Alkenova, Kamila, Bleykher, Galina A.
Published in Coatings (Basel) (01.10.2022)
Published in Coatings (Basel) (01.10.2022)
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