Characterization of mirror-like wafer surfaces using the magic mirror method
Hahn, S., Kugimiya, K., Yamashita, M., Blaustein, P.R., Takahashi, K.
Published in Journal of crystal growth (01.06.1990)
Published in Journal of crystal growth (01.06.1990)
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Journal Article
Conference Proceeding
Investigation of rapid-thermal-processing-induced defects in ion-implanted Czochralski silicon by the magic mirror method
Hahn, S, Kugimiya, K, Yarling, C B, Suga, H, Smith, W L, Blaustein, P R, Takahashi, K
Published in Semiconductor science and technology (01.01.1992)
Published in Semiconductor science and technology (01.01.1992)
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Journal Article