Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source
Rai, S, Bijlsma, K I, Poirier, L, de Wit, E, Assink, L, Lassise, A, Rabadán, I, Méndez, L, Sheil, J, Versolato, O O, Hoekstra, R
Published in Plasma sources science & technology (01.03.2023)
Published in Plasma sources science & technology (01.03.2023)
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Journal Article
Evidence of production of keV Sn + ions in the H 2 buffer gas surrounding an Sn-plasma EUV source
Rai, S, Bijlsma, K I, Poirier, L, de Wit, E, Assink, L, Lassise, A, Rabadán, I, Méndez, L, Sheil, J, Versolato, O O, Hoekstra, R
Published in Plasma sources science & technology (01.03.2023)
Published in Plasma sources science & technology (01.03.2023)
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Journal Article
Single-collision scattering of keV-energy Kr ions off a polycrystalline Cu surface
Rai, S., Bijlsma, K.I., Koeleman, S., Tjepkema, O.G., Noordam, A.W., Jonkman, H.T., Versolato, O.O., Hoekstra, R.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.11.2020)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.11.2020)
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Journal Article