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Extraction of the point-spread function in electron-beam lithography using a cross geometry
by
Schefzyk, D.
,
Biesinger
,
D.E.F
.
,
Wharam, D.A.
Published in
Microelectronic engineering
(01.05.2010)
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applied sciences
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engineering
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physics
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applied sciences
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condensed matter: electronic structure, electrical, magnetic, and optical properties
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cross-disciplinary physics: materials science; rheology
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dosage
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electron beam lithography
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electron-beam lithography
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