Fabrication of high aspect ratio microtube arrays for 2D photonic crystals
Kraeh, C, Popsecu, A, Schieber, M, Hedler, H, Bieniek, T, Wielgoszewski, G, Mocza a, M, Finley, J
Published in Materials research express (01.06.2014)
Published in Materials research express (01.06.2014)
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Journal Article
Using AFM Measurements for Failure Indication During High-Cycle Fatigue Testing of thin Metal Films on MEMS Cantilevers
Osipova, V., Johrmann, N., Heilmann, J., May, D., Arnold, J., Bieniek, T., Pufall, R., Wunderle, B.
Published in 2021 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (19.04.2021)
Published in 2021 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (19.04.2021)
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Conference Proceeding
Si-oxide/Si and Si-oxynitride/Si interfaces analysed by ultra-low energy SIMS
Ćwil, M., Konarski, P., Bieniek, T., Beck, R. B.
Published in Physica status solidi. A, Applications and materials science (01.07.2006)
Published in Physica status solidi. A, Applications and materials science (01.07.2006)
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Journal Article
Conference Proceeding
High cycle fatigue testing and modelling of sputtered aluminium thin films on vibrating silicon MEMS cantilevers
Onken, T., Heilmann, J., Bieniek, T., Pufall, R., Wunderle, B.
Published in 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (01.04.2016)
Published in 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (01.04.2016)
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Conference Proceeding
New approach for a multi-cantilever arrays sensor system with advanced MOEMS readout
Ivaldi, F., Bieniek, T., Janus, P., Zajac, J., Grabiec, P., Majstrzyk, W., Kopiec, D., Gotszalk, T.
Published in 2016 46th European Solid-State Device Research Conference (ESSDERC) (01.09.2016)
Published in 2016 46th European Solid-State Device Research Conference (ESSDERC) (01.09.2016)
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Conference Proceeding
Application of r.f. plasma ultrashallow nitrogen ion implantation for pedestal oxynitride layer formation
Bieniek, T., Beck, R.B., Jakubowski, A., Konarski, P., Ćwil, M., Hoffmann, P., Schmeisser, D.
Published in Vacuum (03.06.2008)
Published in Vacuum (03.06.2008)
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Journal Article
Formation of oxynitride layers in a RF plasma planar reactor for future Si and SiC MOS structures
Bieniek, T., Beck, R. B., Jakubowski, A., Konarski, P., Cwil, M., Hoffmann, P., Schmeisser, D.
Published in Journal of superhard materials (01.06.2007)
Published in Journal of superhard materials (01.06.2007)
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Journal Article
Reliability of sputtered thin aluminium films under accelerated stress testing by vibration loading and modeling
Wunderle, B., Onken, T., Heilmann, J., Silbernagl, D., Arnold, J., Bieniek, T., Pufall, R.
Published in 2016 6th Electronic System-Integration Technology Conference (ESTC) (01.09.2016)
Published in 2016 6th Electronic System-Integration Technology Conference (ESTC) (01.09.2016)
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Conference Proceeding
Innovative SiC over Si photodiode based dual-band, 3D integrated detector
Kociubinski, A., Duk, M., Bieniek, T., Janczyk, G., Borecki, M.
Published in 2014 International 3D Systems Integration Conference (3DIC) (01.12.2014)
Published in 2014 International 3D Systems Integration Conference (3DIC) (01.12.2014)
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Conference Proceeding
Formation of Pedestal Oxynitride Layer by Extremely Shallow Nitrogen Implantation in Planar R.F. Plasma Reactor
Bieniek, Tomasz, Beck, Romuald, Jakubowski, Andrzej, Hoffmann, Patrick, Schmeisser, Dieter, Konarski, Piotr, Cwil, Michal
Published in ECS transactions (07.07.2006)
Published in ECS transactions (07.07.2006)
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Journal Article
The HDL and FE Thermal Modeling of Heterogeneous Systems
Janczyk, G., Bieniek, T.
Published in 2008 11th IEEE Workshop on Design and Diagnostics of Electronic Circuits and Systems (01.04.2008)
Published in 2008 11th IEEE Workshop on Design and Diagnostics of Electronic Circuits and Systems (01.04.2008)
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Conference Proceeding
Novel methodology for 3D MEMS-IC design and co-simulation on MEMS microphone smart system example
Bieniek, T., Janczyk, G., Ekwinska, M., Budzynski, T., Gluszko, G., Grabiec, P., Kociubinski, A.
Published in 2014 International 3D Systems Integration Conference (3DIC) (01.12.2014)
Published in 2014 International 3D Systems Integration Conference (3DIC) (01.12.2014)
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Conference Proceeding
Thermo-mechanical reliability loop in device modeling
Bieniek, T., Janczyk, G., Grabiec, P., Szynka, J.
Published in 2009 15th International Workshop on Thermal Investigations of ICs and Systems (01.10.2009)
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Published in 2009 15th International Workshop on Thermal Investigations of ICs and Systems (01.10.2009)
Conference Proceeding
Integrated thermal modeling of heterogeneous eCubes stacked devices
Janczyk, G., Bieniek, T., Grabiec, P., Szynka, J.
Published in 2008 14th International Workshop on Thermal Inveatigation of ICs and Systems (01.09.2008)
Published in 2008 14th International Workshop on Thermal Inveatigation of ICs and Systems (01.09.2008)
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Conference Proceeding