Localization and Electrical Characterization of Interconnect Open Defects
Rodriguez-Montanes, Rosa, Arumi, Daniel, Figueras, Joan, Beverloo, Willem, de Vries, Dirk K., Eichenberger, Stefan, Volf, Paul A. J.
Published in IEEE transactions on semiconductor manufacturing (01.02.2010)
Published in IEEE transactions on semiconductor manufacturing (01.02.2010)
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Journal Article
Localization and electrical characterization of interconnect open defects
Rodríguez Montañés, Rosa, Arumi Delgado, Daniel, Figueras Pàmies, Joan, Beverloo, Willem, Vries, Dirk K. de, Eichenberger, Stefan, Volf, Paul A. J
Year of Publication 01.02.2010
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Year of Publication 01.02.2010
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