Some aspects on the uncertainty calculation in Mueller ellipsometry
Wurm, Matthias, Grunewald, Tobias, Teichert, Sven, Bodermann, Bernd, Reck, Johanna, Richter, Uwe
Published in Optics express (16.03.2020)
Published in Optics express (16.03.2020)
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Journal Article
Using DNA origami nanorulers as traceable distance measurement standards and nanoscopic benchmark structures
Raab, Mario, Jusuk, Ija, Molle, Julia, Buhr, Egbert, Bodermann, Bernd, Bergmann, Detlef, Bosse, Harald, Tinnefeld, Philip
Published in Scientific reports (29.01.2018)
Published in Scientific reports (29.01.2018)
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Journal Article
Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements
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Journal Article
Conference Proceeding
Nano-structured transmissive spectral filter matrix based on guided-mode resonances
Wu, Wenze, Weber, Leonard, Hinze, Peter, Weimann, Thomas, Dziomba, Thorsten, Bodermann, Bernd, Kroker, Stefanie, Prades, Joan Daniel, Wasisto, Hutomo Suryo, Waag, Andreas
Published in Journal of the European Optical Society. Rapid publications (14.08.2019)
Published in Journal of the European Optical Society. Rapid publications (14.08.2019)
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Journal Article
Imaging Mueller matrix ellipsometry setup for optical nanoform metrology
Käseberg, Tim, Grundmann, Jana, Dickmann, Johannes, Kroker, Stefanie, Bodermann, Bernd
Published in EPJ Web of Conferences (2020)
Published in EPJ Web of Conferences (2020)
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Journal Article
Conference Proceeding
Elementary, my dear Zernike: model order reduction for accelerating optical dimensional microscopy
Manley, Phillip, Krüger, Jan, Zschiedrich, Lin, Hammerschmidt, Martin, Bodermann, Bernd, Köning, Rainer, Schneider, Philipp-Immanuel
Published in EPJ Web of conferences (2022)
Published in EPJ Web of conferences (2022)
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Journal Article
Mueller Matrix Ellipsometric Approach on the Imaging of Sub-Wavelength Nanostructures
Käseberg, Tim, Grundmann, Jana, Siefke, Thomas, Klapetek, Petr, Valtr, Miroslav, Kroker, Stefanie, Bodermann, Bernd
Published in Frontiers in physics (21.01.2022)
Published in Frontiers in physics (21.01.2022)
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Journal Article
Metrology of nanoscale grating structures by UV scatterometry
Wurm, Matthias, Endres, Johannes, Probst, Jürgen, Schoengen, Max, Diener, Alexander, Bodermann, Bernd
Published in Optics express (06.02.2017)
Published in Optics express (06.02.2017)
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Journal Article
Abbildende Müller-Matrix-Ellipsometrie für die Charakterisierung vereinzelter Nanostrukturen
Käseberg, Tim, Grundmann, Jana, Siefke, Thomas, Kroker, Stefanie, Bodermann, Bernd
Published in Technisches Messen (30.06.2022)
Published in Technisches Messen (30.06.2022)
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Journal Article
A new flexible scatterometer for critical dimension metrology
Wurm, Matthias, Pilarski, Frank, Bodermann, Bernd
Published in Review of scientific instruments (01.02.2010)
Published in Review of scientific instruments (01.02.2010)
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Journal Article