Yttria-doped zirconia thin films deposited by atomic layer deposition ALD: a structural, morphological and electrical characterisation
Bernay, Cécile, Ringuedé, Armelle, Colomban, Philippe, Lincot, Daniel, Cassir, Michel
Published in The Journal of physics and chemistry of solids (01.09.2003)
Published in The Journal of physics and chemistry of solids (01.09.2003)
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