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PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
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Year of Publication 28.08.2024
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Pellicle membrane for a lithographic apparatus
REININK Johan, BERGERS Lambertus Idris Johannes Catharina, DONMEZ NOYAN Inci, KLOOTWIJK Johan Hendrik, GIESBERS Adrianus Johannes Maria, VAN DER WOORD Ties Wouter, VERMEULEN Paul Alexander, VAN DE GOOR Tim Willem Johan, HOUWELING Zomer Silvester, KLEIN Alexander Ludwig
Year of Publication 01.06.2024
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Year of Publication 01.06.2024
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PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
VAN DER WOORD, TIES WOUTER, VAN DE GOOR, TIM WILLEM JOHAN, BERGERS, LAMBERTUS IDRIS JOHANNES CATHARINA, KLEIN, ALEXANDER LUDWIG, VERMEULEN, PAUL ALEXANDER, GIESBERS, ADRIANUS JOHANNES MARIA, HOUWELING, ZOMER SILVESTER, DONMEZ NOYAN, INCI, REININK, JOHAN, KLOOTWIJK, JOHAN HENDRIK
Year of Publication 27.04.2023
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Year of Publication 27.04.2023
Patent
Pellicle membrane for a lithographic apparatus
VAN DER WOORD, TIES WOUTER, VAN DE GOOR, TIM WILLEM JOHAN, BERGERS, LAMBERTUS IDRIS JOHANNES CATHARINA, KLEIN, ALEXANDER LUDWIG, VERMEULEN, PAUL ALEXANDER, GIESBERS, ADRIANUS JOHANNES MARIA, HOUWELING, ZOMER SILVESTER, DONMEZ NOYAN, INCI, REININK, JOHAN, KLOOTWIJK, JOHAN HENDRIK
Year of Publication 16.07.2023
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Year of Publication 16.07.2023
Patent