Sub-micron imaging on high-topography wafers using spray coating and projection lithography
Maury, Pascale, Quemper, Jean-Marie, Pocas, Stephane, Vliet, Dick Van, Noordam, Nico, Berge, Peter ten, Best, Keith
Published in Microelectronic engineering (01.05.2010)
Published in Microelectronic engineering (01.05.2010)
Get full text
Journal Article
Conference Proceeding
METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES
SMORENBERG, Pieter Gerardus Jacobus, TEN BERGE, Peter, ELBATTAY, Khalid, STEEN, Steven Erik
Year of Publication 08.02.2024
Get full text
Year of Publication 08.02.2024
Patent
Method for controlling a manufacturing process and associated apparatuses
Ten Berge, Peter, Smorenberg, Pieter Gerardus Jacobus, Elbattay, Khalid, Steen, Steven Erik
Year of Publication 26.09.2023
Get full text
Year of Publication 26.09.2023
Patent
METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES
TEN BERGE, Peter, STEEN, Steven, SMORENBERG, Pieter, ELBATTAY, Khalid
Year of Publication 10.09.2021
Get full text
Year of Publication 10.09.2021
Patent
METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES
TEN BERGE, Peter, ELBATTAY, Khalid, STEEN, Steven Erik, SMORENBERG, Pieter Gerandus Jacobus
Year of Publication 06.04.2023
Get full text
Year of Publication 06.04.2023
Patent
Method and system for increasing accuracy of pattern positioning
Ten Berge, Peter, Wardenier, Peter Hanzen, Deckers, David Frans Simon
Year of Publication 04.05.2021
Get full text
Year of Publication 04.05.2021
Patent
METHOD AND SYSTEM FOR INCREASING ACCURACY OF PATTERN POSITIONING
TEN BERGE, Peter, WARDENIER, Peter Hanzen, DECKERS, David Frans Simon
Year of Publication 23.04.2020
Get full text
Year of Publication 23.04.2020
Patent
METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES
TEN BERGE, Peter, STEEN, Steven, Erik, ELBATTAY, Khalid, SMORENBERG, Pieter, Gerardus, Jacobus
Year of Publication 22.09.2021
Get full text
Year of Publication 22.09.2021
Patent
Methods and apparatus for measuring a property of a substrate
De Mol, Christianus Gerardus Maria, Li, Chung-Hsun, Ten Berge, Peter, Verstappen, Leonardus Henricus Marie, Jungblut, Reiner Maria, Van Bilsen, Franciscus Bernardus Maria, Tolsma, Hoite Pieter Theodoor, Elings, Wouter Lodewijk, Dicker, Gerald, Van Wijnen, Paul Jacques, Mos, Everhardus Cornelis
Year of Publication 07.05.2024
Get full text
Year of Publication 07.05.2024
Patent
Method and apparatus to correct for patterning process error
Ten Berge, Peter, Van Haren, Richard Johannes Franciscus, Slotboom, Daan Maurits, Wardenier, Peter Hanzen
Year of Publication 21.07.2020
Get full text
Year of Publication 21.07.2020
Patent