Micromachining of buried micro channels in silicon
de Boer, M.J., Tjerkstra, R.W., Berenschot, J.W., Jansen, H.V., Burger, G.J., Gardeniers, J.G.E., Elwenspoek, M., van den Berg, A.
Published in Journal of microelectromechanical systems (01.03.2000)
Published in Journal of microelectromechanical systems (01.03.2000)
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Journal Article
3D topographies promote macrophage M2d-Subset differentiation
Carrara, Stefania C., Davila-Lezama, Amanda, Cabriel, Clément, Berenschot, Erwin J.W., Krol, Silke, Gardeniers, J.G.E., Izeddin, Ignacio, Kolmar, Harald, Susarrey-Arce, Arturo
Published in Materials today bio (01.02.2024)
Published in Materials today bio (01.02.2024)
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Journal Article
Resistless patterning of sub-micron structures by evaporation through nanostencils
Brugger, J., Berenschot, J.W., Kuiper, S., Nijdam, W., Otter, B., Elwenspoek, M.
Published in Microelectronic engineering (01.06.2000)
Published in Microelectronic engineering (01.06.2000)
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Journal Article
Conference Proceeding
A micromachined pressure/flow-sensor
Oosterbroek, R.E., Lammerink, T.S.J., Berenschot, J.W., Krijnen, G.J.M., Elwenspoek, M.C., van den Berg, A.
Published in Sensors and actuators. A. Physical. (02.11.1999)
Published in Sensors and actuators. A. Physical. (02.11.1999)
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Journal Article
Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation
Hien Duy Tong, Gielens, F.C., Gardeniers, J.G.E., Jansen, H.V., Berenschot, J.W., de Boer, M.J., de Boer, J.H., van Rijn, C.J.M., Elwenspoek, M.C.
Published in Journal of microelectromechanical systems (01.02.2005)
Published in Journal of microelectromechanical systems (01.02.2005)
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Journal Article
Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers
Rusu, C., van't Oever, R., de Boer, M.J., Jansen, H.V., Berenschot, J.W., Bennink, M.L., Kanger, J.S., de Grooth, B.G., Elwenspoek, M., Greve, J., Brugger, J., van den Berg, A.
Published in Journal of microelectromechanical systems (01.06.2001)
Published in Journal of microelectromechanical systems (01.06.2001)
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Journal Article
Three-Dimensional Fractal Geometry for Gas Permeation in Microchannels
Malankowska, Magdalena, Schlautmann, Stefan, Berenschot, Erwin J W, Tiggelaar, Roald M, Pina, Maria Pilar, Mallada, Reyes, Tas, Niels R, Gardeniers, Han
Published in Micromachines (Basel) (27.01.2018)
Published in Micromachines (Basel) (27.01.2018)
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Journal Article
Micromachining of high-contrast optical waveguides in [111] silicon wafers
Pandraud, G., Veldhuis, G., Berenschot, J.W., Nijdam, A.J., Hoekstra, H.J.W.M., Parriaux, O., Lambeck, P.V.
Published in IEEE photonics technology letters (01.03.2000)
Published in IEEE photonics technology letters (01.03.2000)
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Journal Article
Highly uniform sieving structure by corner lithography and silicon wet etching
Schurink, B., Berenschot, J.W., Tiggelaar, R.M., Luttge, R.
Published in Microelectronic engineering (16.08.2015)
Published in Microelectronic engineering (16.08.2015)
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Journal Article
Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges
Legrain, A., Berenschot, J.W., Tas, N.R., Abelmann, L.
Published in Microelectronic engineering (01.06.2015)
Published in Microelectronic engineering (01.06.2015)
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Journal Article
Sacrificial wafer bonding for planarization after very deep etching
Spiering, V.L., Berenschot, J.W., Elwenspoek, M., Fluitman, J.H.J.
Published in Journal of microelectromechanical systems (01.09.1995)
Published in Journal of microelectromechanical systems (01.09.1995)
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Journal Article
Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane
Tiggelaar, R.M., Male, P. van, Berenschot, J.W., Gardeniers, J.G.E., Oosterbroek, R.E., Croon, M.H.J.M. de, Schouten, J.C., Berg, A. van den, Elwenspoek, M.C.
Published in Sensors and actuators. A. Physical. (28.03.2005)
Published in Sensors and actuators. A. Physical. (28.03.2005)
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Journal Article
Fabrication and characterization of microfluidic pedestal nozzles enabling geometric contact line pinning
Borgelink, Bjorn T.H., Berenschot, Erwin J.W., Sanders, Remco G.P., Schlautmann, Stefan, Tas, Niels R., Gardeniers, Han J.G.E.
Published in Sensors and actuators. B, Chemical (15.08.2022)
Published in Sensors and actuators. B, Chemical (15.08.2022)
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Journal Article
Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes
Tiggelaar, R M, Berenschot, J W, de Boer, J H, Sanders, R G P, Gardeniers, J G E, Oosterbroek, R E, van den Berg, A, Elwenspoek, M C
Published in Lab on a chip (01.01.2005)
Published in Lab on a chip (01.01.2005)
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