Search Results - "Benjamin, Neil Martin Paul" :: K.UTB vyhledávací portál

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향상된 폐루프 (closed loop) 가스 기반 열 교환

by BENJAMIN NEIL MARTIN PAUL, DREWERY JOHN STEPHEN
Year of Publication 06.01.2023

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유지보수 모드 전력 공급 시스템

by BENJAMIN NEIL MARTIN PAUL, PEASE JOHN
Year of Publication 09.03.2021

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Patent

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PLASMA IGNITION AND SUSTAINING METHODS AND APPARATUSES

by BENJAMIN NEIL MARTIN PAUL, FISCHER ANDREAS
Year of Publication 20.09.2017

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METHODS AND APPARATUS FOR AN INDUCTION COIL ARRANGEMENT IN A PLASMA PROCESSING SYSTEM

by BENJAMIN NEIL MARTIN PAUL
Year of Publication 19.06.2013

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고전력 RF 나선 코일 필터

by BENJAMIN NEIL MARTIN PAUL, MOPIDEVI HEMA SWAROOP, JAFARIAN TEHRANI SEYED JAFER, O'BRIEN SEAN KELLY, AUGUSTINO JASON
Year of Publication 10.08.2020

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RF ISOLATION FOR POWER CIRCUITRY

by BENJAMIN NEIL MARTIN PAUL
Year of Publication 07.08.2012

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RF ELECTROSTATIC CHUCK INCLUDING CLAMP ELECTRODE ASSEMBLY FORMING PORTION OF FARADAY CAGE FOR RF DELIVERY AND ASSOCIATED METHODS

by BENJAMIN NEIL MARTIN PAUL, POVOLNY HENRY, RICCI ANTHONY J
Year of Publication 16.05.2018

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RF CERAMIC ELECTROSTATIC CHUCK INCLUDING EMBEDDED FARADAY CAGE FOR RF DELIVERY AND ASSOCIATED METHODS FOR OPERATION MONITORING AND CONTROL

by BENJAMIN NEIL MARTIN PAUL, POVOLNY HENRY, RICCI ANTHONY J
Year of Publication 16.05.2018

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RF ELECTROSTATIC CHUCK INCLUDING EMBEDDED FARADAY CAGE FOR RF DELIVERY AND ASSOCIATED METHODS FOR OPERATION MONITORING AND CONTROL

by BENJAMIN NEIL MARTIN PAUL, POVOLNY HENRY, RICCI ANTHONY J
Year of Publication 06.02.2017

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SYNCHRONIZED AND SHORTENED MASTER-SLAVE RF PULSING IN A PLASMA PROCESSING CHAMBER

by BENJAMIN NEIL MARTIN PAUL, SATO ARTHUR H
Year of Publication 21.05.2014

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METHODS AND APPARATUS FOR IGNITING AND SUSTAINING PLASMA

by BENJAMIN NEIL MARTIN PAUL, FISCHER ANDREAS
Year of Publication 23.12.2013

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Patent

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PLASMA IGNITION AND SUSTAINING METHODS AND APPARATUSES

by BENJAMIN NEIL MARTIN PAUL, FISCHER ANDREAS
Year of Publication 12.11.2013

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METHODS AND ARRANGEMENTS FOR IN-SITU PROCESS MONITORING AND CONTROL FOR PLASMA PROCESSING TOOLS

by BENJAMIN NEIL MARTIN PAUL, VENUGOPAL VIJAYAKUMAR C
Year of Publication 19.04.2012

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CURRENT CONTROL IN PLASMA PROCESSING SYSTEMS

by BENJAMIN NEIL MARTIN PAUL, LONG MAOLIN, JAFARIAN TEHRANI SEYED JAFAR, SATO ARTHUR, WILLIAMS NORMAN
Year of Publication 03.08.2012

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COOLING FOR A PLASMA-BASED REACTOR

by Drewery, John Stephen, Benjamin, Neil Martin Paul
Year of Publication 31.08.2023

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Cooling for a plasma-based reactor

by Drewery, John Stephen, Benjamin, Neil Martin Paul
Year of Publication 13.06.2023

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Patent

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ENHANCED CLOSED LOOP GAS BASED HEAT EXCHANGE

by Drewery, John Stephen, Benjamin, Neil Martin Paul
Year of Publication 01.06.2023

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COOLING FOR A PLASMA-BASED REACTOR

by Drewery, John Stephen, Benjamin, Neil Martin Paul
Year of Publication 05.05.2022

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Maintenance mode power supply system

by Pease, John, Benjamin, Neil Martin Paul
Year of Publication 19.01.2021

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COOLING FOR A PLASMA-BASED REACTOR

by BENJAMIN, Neil Martin Paul, DREWERY, John Stephen
Year of Publication 15.10.2020

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Patent

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