Resonant Sensing Element Realized as a Single Crystal Si Cantilever Actuated by Fringing Electrostatic Fields
Halevy, Omer, Benjamin, Erez B., Kessler, Yoav, Krylov, Slava
Published in IEEE sensors journal (01.05.2021)
Published in IEEE sensors journal (01.05.2021)
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Journal Article
Electrostatically Actuated SOI In-Plane Motion Platform for In-Situ Calibration of Micro Gyroscopes
Benjamin, Erez, Maimon, Ronen, Ronen, Aviv, Yichie, Eldad, Krylov, Slava
Published in 2023 IEEE SENSORS (29.10.2023)
Published in 2023 IEEE SENSORS (29.10.2023)
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Conference Proceeding
Bistable force\acceleration sensor based on pull-in voltage monitoring
Benjamin, Erez B., Lullinsky, Stella, Krylov, Slava
Published in 2016 IEEE International Symposium on Inertial Sensors and Systems (01.02.2016)
Published in 2016 IEEE International Symposium on Inertial Sensors and Systems (01.02.2016)
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Conference Proceeding
Micromechanical Bistable Flow Sensors
Krylov, Slava, Kessler, Yoav, Benjamin, Erez, Torteman, Ben, Liberzon, Alex
Published in 2018 IEEE SENSORS (01.10.2018)
Published in 2018 IEEE SENSORS (01.10.2018)
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Conference Proceeding