Split sputter mode: a novel sputtering method for flat-panel display manufacturing
Pieralisi, Fabio, Hanika, Markus, Scheer, Evelyn, Bender, Marcus
Published in Journal of Information Display (01.06.2011)
Published in Journal of Information Display (01.06.2011)
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Journal Article
High‐Performance Coplanar Dual‐Channel a‐InGaZnO/a‐InZnO Semiconductor Thin‐Film Transistors with High Field‐Effect Mobility
Billah, Mohammad Masum, Siddik, Abu Bakar, Kim, Jung Bae, Yim, Dong Kil, Choi, Soo Young, Liu, Jian, Severin, Daniel, Hanika, Markus, Bender, Marcus, Jang, Jin
Published in Advanced electronic materials (01.03.2021)
Published in Advanced electronic materials (01.03.2021)
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Journal Article
기판 상에 재료를 증착하는 방법
ZILBAUER THOMAS WERNER, BENDER MARCUS, HELLMICH ANKE, CHOI SOO YOUNG, HINTERSCHUSTER REINER, MUNDORF CHRISTOPH
Year of Publication 17.10.2023
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Year of Publication 17.10.2023
Patent
기판 상에 박막 트랜지스터의 층들을 증착하는 방법 및 스퍼터 증착 장치
GRILLMAYER JUERGEN, KIM JUNG BAE, LIM RODNEY SHUNLEONG, TSAI YUN CHU, BENDER MARCUS, YIM DONG KIL
Year of Publication 26.07.2022
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Year of Publication 26.07.2022
Patent
Multi-oxide active layer deposition using Applied Materials Pivot array coater for high-mobility metal oxide TFT
Park, Hyun Chan, Scheer, Evelyn, Witting, Karin, Hanika, Markus, Bender, Marcus, Hsu, Hao Chien, Yim, Dong Kil
Published in Applied physics. A, Materials science & processing (01.11.2015)
Published in Applied physics. A, Materials science & processing (01.11.2015)
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Journal Article
(Invited) Highly Stable Self-Aligned Top-Gate Indium Gallium Zinc Oxide Thin-Film Transistors for High-Resolution OLED TV and Mobile Displays
Kim, Jung Bae, Tsai, Yun-chu (Pipi), Lim, Rodney, Wang, Zhiyuan, Hao, Mei, Wang, Sheng-Wen (Gordon), Park, Jung Woo, Zhao, Lai, Bender, Marcus, Yim, Dong Kil, Choi, Soo Young
Published in ECS transactions (08.09.2020)
Published in ECS transactions (08.09.2020)
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Journal Article
기판을 프로세싱하는 진공 프로세싱 장치 및 방법
OLSON JOSEPH C, BENDER MARCUS, KURUNCZI PETER F, YIM DONG KIL, HANIKA MARKUS
Year of Publication 02.12.2020
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Year of Publication 02.12.2020
Patent
기판의 진공 프로세싱을 위한 방법, 박막 트랜지스터, 및 기판의 진공 프로세싱을 위한 장치
OLSON JOSEPH C, BENDER MARCUS, KURUNCZI PETER F, YIM DONG KIL, HANIKA MARKUS
Year of Publication 01.10.2018
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Year of Publication 01.10.2018
Patent
SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL
LOPP ANDREAS, BENDER MARCUS, LIU JIAN, PIERALISI FABIO, SCHWANITZ KONRAD, HANIKA MARKUS, SCHEER EVELYN, LINDENBERG RALPH, MAHNKE GUIDO
Year of Publication 11.10.2018
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Year of Publication 11.10.2018
Patent
SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL
LOPP ANDREAS, BENDER MARCUS, LIU JIAN, PIERALISI FABIO, SCHWANITZ KONRAD, HANIKA MARKUS, SCHEER EVELYN, LINDENBERG RALPH, MAHNKE GUIDO
Year of Publication 14.09.2018
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Year of Publication 14.09.2018
Patent
METHOD FOR COATING A SUBSTRATE AND COATER
BENDER MARCUS, PIERALISI FABIO, HANIKA MARKUS, SCHEER EVELYN, MAHNKE GUIDO
Year of Publication 13.05.2015
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Year of Publication 13.05.2015
Patent
PVD EDGE UNIFORMITY IMPROVEMENT IN PVD ARRAY COATERS
GAERTNER HARALD, SEVERIN DANIEL, BENDER MARCUS, PIERALISI FABIO, SCHEER EVELYN, LINDENBERG RALPH
Year of Publication 20.12.2016
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Year of Publication 20.12.2016
Patent
Properties of rf-sputtered indium–tin-oxynitride thin films
Aperathitis, Elias, Bender, Marcus, Cimalla, Volker, Ecke, Gernot, Modreanu, Mircea
Published in Journal of applied physics (15.07.2003)
Published in Journal of applied physics (15.07.2003)
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