Large area, high resolution analysis of surface roughness of semiconductors using interference microscopy
Montgomery, P.C., Benatmane, A., Fogarassy, E., Ponpon, J.P.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (30.04.2002)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (30.04.2002)
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Conference Proceeding
Multi-level relief structures in sol–gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy
Neiss, E., Flury, M., Gérard, P., Mager, L., Rehspringer, J.-L., Fort, A., Montgomery, P., Fontaine, J., Engel, T., Benatmane, A.
Published in Applied surface science (30.01.2008)
Published in Applied surface science (30.01.2008)
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Journal Article
Buried interface characterization by interference microscopy
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Journal Article
Conference Proceeding
Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics
Flury, M., Benatmane, A., Gérard, P., Montgomery, P.C., Fontaine, J., Engel, T., Schunck, J.P., Fogarassy, E.
Published in Applied surface science (15.03.2003)
Published in Applied surface science (15.03.2003)
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Journal Article
Amorphous phase evolution during crystallization of poly(ethylene-terephthalate)
VIGIER, G, TATIBOUET, J, BENATMANE, A, VASSOILLE, R
Published in Colloid and polymer science (01.12.1992)
Published in Colloid and polymer science (01.12.1992)
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2D discrete high order energy operators for surface profiling using white light interferometry
Salzenstein, F., Montgomery, P., Benatmane, A., Boudraa, A.
Published in Seventh International Symposium on Signal Processing and Its Applications, 2003. Proceedings (2003)
Published in Seventh International Symposium on Signal Processing and Its Applications, 2003. Proceedings (2003)
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Conference Proceeding
Multi-level relief structures in solgel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy
Neiss, E., Flury, M., Gérard, P., Mager, L., Rehspringer, J.L., Fort, A., Montgomery, P.C., Fontaine, Julien, Engel, T., Benatmane, A.
Published in Applied surface science (2008)
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Published in Applied surface science (2008)
Journal Article
Multi-level relief structures in solgel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy
Neiss, E., Flury, M., Gérard, P., Mager, L., Rehspringer, J.L., Fort, A., Montgomery, P.C., Fontaine, Julien, Engel, T., Benatmane, A.
Published in Applied surface science (2008)
Get full text
Published in Applied surface science (2008)
Journal Article