Copper Catalysis Effect Investigation for TiW Etch Process on Patterned Wafers
Votta, Annamaria, Bellandi, Enrico, Venegoni, Ivan, Alessandri, Mauro, Pipia, Francesco
Published in Solid state phenomena (01.02.2021)
Published in Solid state phenomena (01.02.2021)
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Journal Article
An optical study of alumina films thermal evolution upon ammonia annealing
Bellandi, Enrico, Del Vitto, Annalisa, Nale, Angelo Claudio, Piagge, Rossella, Caniatti, Massimo, Alessandri, Mauro
Published in Microelectronic engineering (01.12.2008)
Published in Microelectronic engineering (01.12.2008)
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Journal Article
Conference Proceeding
Structural and Chemical Investigation of Annealed Al2O3 Films for Interpoly Dielectric Application in Flash Memories
Alessandri, Mauro, Piagge, Rossella, Caniatti, Massimo, Del Vitto, Annalisa, Wiemer, Claudia, Pavia, Giuseppe, Alberici, Stefano, Bellandi, Enrico, Nale, Angeloclaudio
Published in ECS transactions (20.10.2006)
Published in ECS transactions (20.10.2006)
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Journal Article
Study of SiO2 Modifications Induced by Oxygen Plasmas and Their Effect on Wet Processes
Votta, Annamaria, Bellandi, Enrico, Alessandri, Mauro, Vedda, Anna, Ferretti, Anna, Fasoli, Mauro, Moretti, Federico
Published in ECS transactions (28.09.2007)
Published in ECS transactions (28.09.2007)
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Journal Article
High-k Materials in Flash Memories
Alessandri, Mauro, Piagge, Rossella, Alberici, Stefano, Bellandi, Enrico, Caniatti, Massimo, Ghidini, Gabriella, Modelli, Alberto, Pavia, Giuseppe, Ravizza, Enrica, Sebastiani, Alessandro, Wiemer, Claudia, Spiga, Sabina, Fanciulli, Marco, Fiorentini, Vincenzo, Cadelano, Emiliano, Lopez, Giorgia Maria
Published in ECS transactions (07.07.2006)
Published in ECS transactions (07.07.2006)
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Journal Article
Structural and Chemical Investigation of Annealed Al2O3 Films for Interpoly Dielectric Applications in Flash Memories
Alessandri, Mauro, Piagge, Rossella, Caniatti, Massimo, Del Vitto, Annalisa, Wiemer, Claudia, Pavia, Giuseppe, Alberici, Stefano, Bellandi, Enrico, Nale, Angeloclaudio
Published in Meeting abstracts (Electrochemical Society) (30.06.2006)
Published in Meeting abstracts (Electrochemical Society) (30.06.2006)
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Journal Article
High-k Materials in Flash Memories
Alessandri, Mauro, Piagge, Rossella, Alberici, Stefano, Bellandi, Enrico, Caniatti, Massimo, Ghidini, Gabriella, Modelli, Alberto, Pavia, Giuseppe, Ravizza, Enrica, Sebastiani, Alessandro, Wiemer, Claudia, Spiga, Sabina, Fanciulli, Marco, Fiorentini, Vincenzo, Cadelano, Emiliano, Lopez, Giorgia Maria
Published in Meeting abstracts (Electrochemical Society) (17.02.2006)
Published in Meeting abstracts (Electrochemical Society) (17.02.2006)
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Journal Article