On mechanisms governing AlN and AlGaN growth rate and composition in large substrate size planetary MOVPE reactors
Dauelsberg, Martin, Brien, Daniel, Rauf, Hendrik, Reiher, Fabian, Baumgartl, Johannes, Häberlen, Oliver, Segal, Alexander S., Lobanova, Anna V., Yakovlev, Eugene V., Talalaev, Roman A.
Published in Journal of crystal growth (01.05.2014)
Published in Journal of crystal growth (01.05.2014)
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Journal Article
Conference Proceeding
Mobile Assembly Units as Enabler for Changeable Assembly Lines
Weber, Jakob, Stäbler, Markus, Baumgartl, Johannes, Paetzold, Kristin
Published in Procedia CIRP (2016)
Published in Procedia CIRP (2016)
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Journal Article
Multiple epitaxial Si film deposition by APCVD for power semiconductors
Kunle, Matthias, Baumgartl, Johannes, Koren, Katrin, Fiedler, Olaf
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding
Air Gap CV measurement for doping concentration in epitaxial silicon
Heider, Franz, Baumgartl, Johannes, Horvath, Peter, Jaehrling, Thomas
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01.05.2014)
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01.05.2014)
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Conference Proceeding
METHODS FOR FORMING SEMICONDUCTOR DEVICES
FISCHER PETRA, GRUBER CHRISTOPH, EHRENTRAUT GEORG, GAISBERGER RICHARD, POELZL MARTIN, STEINBRENNER JUERGEN, JOSHI RAVI KESHAV, BAUMGARTL JOHANNES
Year of Publication 17.05.2017
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Year of Publication 17.05.2017
Patent
Enhanced Equipment and New Processes As Enabler for Power Technologies on 300mm Substrates
Engelhardt, Manfred, Baumgartl, Johannes, Denifl, Guenter, Ehrentraut, Georg, Kuenle, Matthias, Stadtmueller, Michael, Werner, Sebastian, Crippa, Danilo, Kraft, Martin
Published in ECS transactions (31.03.2015)
Published in ECS transactions (31.03.2015)
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Journal Article
Method of Manufacturing a Semiconductor Device with Epitaxial Layers and an Alignment Mark
Baumgartl, Johannes, Weber, Hans, Mezoesi, Gabor, Treu, Michael, Moser, Andreas
Year of Publication 11.06.2020
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Year of Publication 11.06.2020
Patent
A fast, GPU-based geometrical placement planner for unknown sensor-modelled objects and placement areas
Baumgartl, Johannes, Werner, Tim, Kaminsky, Per, Henrich, Dominik
Published in 2014 IEEE International Conference on Robotics and Automation (ICRA) (01.05.2014)
Published in 2014 IEEE International Conference on Robotics and Automation (ICRA) (01.05.2014)
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Conference Proceeding
Method of manufacturing a semiconductor device with epitaxial layers and an alignment mark
Baumgartl, Johannes, Weber, Hans, Mezoesi, Gabor, Treu, Michael, Moser, Andreas
Year of Publication 24.03.2020
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Year of Publication 24.03.2020
Patent