Low-temperature deposition of nanocrystalline diamond films on silicon nitride substrates using distributed antenna array PECVD system
Baudrillart, Benoît, Bénédic, Fabien, Melouani, Amel S., Oliveira, Filipe J., Silva, Rui F., Achard, Jocelyn
Published in Physica status solidi. A, Applications and materials science (01.10.2016)
Published in Physica status solidi. A, Applications and materials science (01.10.2016)
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Journal Article
Microstructure and growth kinetics of nanocrystalline diamond films deposited in large area/low temperature distributed antenna array microwave-plasma reactor
Baudrillart, Benoît, Bénédic, Fabien, Brinza, Ovidiu, Bieber, Thomas, Chauveau, Thierry, Achard, Jocelyn, Gicquel, Alix
Published in Physica status solidi. A, Applications and materials science (01.11.2015)
Published in Physica status solidi. A, Applications and materials science (01.11.2015)
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Journal Article
Investigation of Nucleation and Growth of Nanocrystalline Diamond Films Deposited at Low Temperature Using In Situ Laser Reflectance Interferometry
Baudrillart, Benoit, Bénédic, Fabien, Tardieu, André, Achard, Jocelyn
Published in Physica status solidi. A, Applications and materials science (01.11.2017)
Published in Physica status solidi. A, Applications and materials science (01.11.2017)
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Journal Article
Diamond/ZnO/LiNbO3 structure for packageless acoustic wave sensors
Floer, Cecile, Benedic, Fabien, Zhgoon, Sergei, Talbi, Abdelkrim, Matar, Olivier Bou, Bartoli, Florian, Aubert, Thierry, Moutaouekkil, Mohammed, Bartoli, Florian, Mishra, Harshad, McMurtry, Stefan, Hage-Ali, Sami, Elmazria, Omar, Dekkar, Damia, Baudrillart, Benoit
Published in 2017 IEEE SENSORS (01.10.2017)
Published in 2017 IEEE SENSORS (01.10.2017)
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