Deep multilevel wet etching of fused silica glass microstructures in BOE solution
Konstantinova, T G, Andronic, M M, Baklykov, D A, Stukalova, V E, Ezenkova, D A, Zikiy, E V, Bashinova, M V, Solovev, A A, Lotkov, E S, Ryzhikov, I A, Rodionov, I A
Published in Scientific reports (30.03.2023)
Published in Scientific reports (30.03.2023)
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Journal Article
Deep multilevel wet etching of fused silica glass microstructures in BOE solution
Konstantinova, T. G, Andronic, M. M, Baklykov, D. A, Stukalova, V. E, Ezenkova, D. A, Zikiy, E. V, Bashinova, M. V, Solovev, A. A, Lotkov, E. S, Ryzhikov, I. A, Rodionov, I. A
Year of Publication 13.12.2022
Year of Publication 13.12.2022
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Journal Article
Deep multilevel wet etching of fused silica glass microstructures in BOE solution
Konstantinova, T G, Andronic, M M, Baklykov, D A, Stukalova, V E, Ezenkova, D A, Zikiy, E V, Bashinova, M V, Solovev, A A, Lotkov, E S, Ryzhikov, I A, Rodionov, I A
Published in arXiv.org (13.12.2022)
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Published in arXiv.org (13.12.2022)
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