Reduction, reclaim and reuse of sulfuric acid in piranha cleans: GF: Green factory
Patil, Sushil K. R., Baru, Ioan, Franzi, Albert, Conrad, Mark, Gaddam, Sneha, Kim, Tae-Hoon
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
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