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Published in ECS transactions (06.03.2009)
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Published in ECS transactions (06.03.2009)
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Published in Thin solid films (15.12.1996)
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Optimization of SiO 2 film conformality in TEOS/O 3 APCVD
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Protective shield and system for gas distribution
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Year of Publication 03.04.2003
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Protective shield and system for gas distribution
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Protective shield and system for gas distribution
HAKIMELAHY IRAJ, BARTHOLOMEW LARRY D, MATTSON COLBY, PARK SEUNG GYUN, YUH SOON K
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Year of Publication 03.04.2003
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