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Year of Publication 07.03.2006
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Low-k interlevel dielectric layer (ILD)
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Year of Publication 07.03.2006
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Year of Publication 07.03.2006
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Laminated diffusion barrier
FITZSIMMONS JOHN ANTHONY, BARTH EDWARD PAUL, IVERS THOMAS HENRY, COHEN STEPHAN A, RESTAINO DARRYL D, WILDMAN HORATIO SEYMOUR, PURUSHOTHAMAN SAMPATH, DZIOBKOWSKI CHESTER, GATES STEPHEN MCCONNELL
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Year of Publication 27.04.2004
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Laminated diffusion barrier
FITZSIMMONS JOHN ANTHONY, BARTH EDWARD PAUL, IVERS THOMAS HENRY, COHEN STEPHAN A, RESTAINO DARRYL D, WILDMAN HORATIO SEYMOUR, PURUSHOTHAMAN SAMPATH, DZIOBKOWSKI CHESTER, GATES STEPHEN MCCONNELL
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Year of Publication 21.11.2002
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