ROTATING DISK REACTOR WITH FERROFLUID SEAL FOR CHEMICAL VAPOR DEPOSITION
LUSE TODD A, GURARY ALEXANDER I, POLLOCK JOHN D, BARRISS LOUISE S, FREMGEN ROGER P, COMUNALE RICHARD A, MILGATE III ROBERT WHITE
Year of Publication 02.03.2016
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Year of Publication 02.03.2016
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Rotating disk reactor with ferrofluid seal for chemical vapor deposition
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Year of Publication 21.07.2020
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Year of Publication 21.07.2020
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Rotating Disk Reactor With Ferrofluid Seal For Chemical Vapor Deposition
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Year of Publication 06.04.2017
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Year of Publication 06.04.2017
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Rotating Disk Reactor With Ferrofluid Seal For Chemical Vapor Deposition
LUSE TODD A, GURARY ALEXANDER I, POLLOCK JOHN D, MILGATE, III ROBERT WHITE, BARRISS LOUISE S, FREMGEN ROGER P, COMUNALE RICHARD A
Year of Publication 19.03.2015
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Year of Publication 19.03.2015
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Rotating disk reactor with ferrofluid seal for chemical vapor deposition
LUSE TODD A, GURARY ALEXANDER I, POLLOCK JOHN D, BARRISS LOUISE S, FREMGEN ROGER P, COMUNALE RICHARD A, MILGATE III ROBERT WHITE
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Year of Publication 21.01.2015
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Year of Publication 01.06.2017
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Year of Publication 01.06.2017
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Rotating disk reactor with ferrofluid seal for chemical vapor deposition
LUSE TODD A, GURARY ALEXANDER I, POLLOCK JOHN D, BARRISS LOUISE S, FREMGEN ROGER P, COMUNALE RICHARD A, MILGATE III ROBERT WHITE
Year of Publication 06.07.2016
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Year of Publication 06.07.2016
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Rotating disk reactor with ferrofluid seal for chemical vapor deposition
GURARY, ALEXANDER I, BARRISS, LOUISE S, COMUNALE, RICHARD A, FREMGEN, ROGER P, LUSE, TODD A, POLLOCK, JOHN D, MILGATE, ROBERT WHITE
Year of Publication 11.06.2016
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Year of Publication 11.06.2016
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Substrate carrier for chemical vapor deposition
GURARY, ALEXANDER I, BARRISS, LOUISE S, COMUNALE, RICHARD A, FREMGEN, ROGER P, LUSE, TODD A, POLLOCK, JOHN D, MILGATE, ROBERT WHITE
Year of Publication 01.06.2016
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Year of Publication 01.06.2016
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Device for the detection of substrates stacked with a specific spacing
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Year of Publication 19.09.2006
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Year of Publication 19.09.2006
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Device for the detection of substrates stacked with a specific spacing
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Year of Publication 19.09.2006
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Year of Publication 19.09.2006
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