(Invited) Deep Silicon Etching - Increasingly Relevant >20 Years on
Thomas, Dave, Muggeridge, Matthew, Hopkins, Janet, Launay, Nicolas, Ashraf, Huma, Barrass, Tony
Published in ECS transactions (28.07.2016)
Published in ECS transactions (28.07.2016)
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Journal Article
(Invited) Deep Silicon Etching Increasingly Relevant >20 Years on
Thomas, Dave, Muggeridge, Matthew, Hopkins, Janet, Launay, Nicolas, Ashraf, Huma, Barrass, Tony
Published in Meeting abstracts (Electrochemical Society) (01.04.2016)
Published in Meeting abstracts (Electrochemical Society) (01.04.2016)
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Journal Article
A new plasma source for next generation MEMS deep Si etching: Minimal tilt, improved profile uniformity and higher etch rates
Barnett, Richard, Thomas, Dave, Yiping Song, Tossell, David, Barrass, Tony, Ansell, Oliver
Published in 2010 Proceedings 60th Electronic Components and Technology Conference (ECTC) (01.06.2010)
Published in 2010 Proceedings 60th Electronic Components and Technology Conference (ECTC) (01.06.2010)
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Conference Proceeding