Waveguide effect in high-NA EUV lithography: The key to extending EUV lithography to the 4-nm node
Yeung, Michael, Barouch, Eytan, Oh, Hye-Keun
Published in Japanese Journal of Applied Physics (01.06.2015)
Published in Japanese Journal of Applied Physics (01.06.2015)
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Journal Article
Imaging performance of mesh supported pellicle for extreme ultraviolet lithography
Ko, Ki-Ho, Kim, Guk-Jin, Yeung, Michael, Barouch, Eytan, Oh, Hye-Keun
Published in Japanese Journal of Applied Physics (01.06.2014)
Published in Japanese Journal of Applied Physics (01.06.2014)
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Journal Article
Long-Time Instability of Pseudospectral Time-Domain Method in Curvilinear Coordinates
Yeung, Michael, Barouch, Eytan
Published in IEEE transactions on antennas and propagation (01.04.2020)
Published in IEEE transactions on antennas and propagation (01.04.2020)
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Journal Article
Derivation and Simulation of Higher Numerical Aperture Scalar Aerial Images
Cole, Daniel C., Barouch, Eytan, Hollerbach, Uwe, Orszag, Steven A.
Published in Japanese Journal of Applied Physics (01.12.1992)
Published in Japanese Journal of Applied Physics (01.12.1992)
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Journal Article
Heterocoagulation II. Interaction energy of two unequal spheres
Barouch, Eytan, Matijević, Egon, Ring, Terry A, Finlan, J.Michael
Published in Journal of colloid and interface science (01.10.1978)
Published in Journal of colloid and interface science (01.10.1978)
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Journal Article
Diffusional detachment of colloidal particles from solid/solution interfaces
Kallay, Nikola, Barouch, Eytan, Matijević, Egon
Published in Advances in colloid and interface science (01.05.1987)
Published in Advances in colloid and interface science (01.05.1987)
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Journal Article
Kinetics of particle detachment
Barouch, Eytan, Wright, Thomas H., Matijević, Egon
Published in Journal of colloid and interface science (01.08.1987)
Published in Journal of colloid and interface science (01.08.1987)
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Journal Article
Manufacturability of Electronic Chips
Vallishayee, Rakesh R, Orszag, Steven A, Jackson, Eric, Barouch, Eytan
Published in Theoretical and computational fluid dynamics (01.01.1998)
Published in Theoretical and computational fluid dynamics (01.01.1998)
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