Helium ion bombardment of thin aluminium films
Donnelly, S.E, Bodart, F, Barfoot, K.M, Werz, R, Webb, R.P
Published in Thin solid films (27.08.1982)
Published in Thin solid films (27.08.1982)
Get full text
Journal Article
Materials and devices toward three-dimensional integration
Dunne, B., O'Flanagan, S., Hobbs, L., Cahill, C.G., Mathewson, A., Lane, W.A., Montier, M., Chapuis, D., Gris, Y., Karapiperis, L., Garry, G., Dieumegard, D., Regolini, J.L., Bensahel, D., Mermet, J.L., Bono, H., Achard, H., Joly, J.P., Barfoot, K.M., Field, M., Hopper, G.F., Godfrey, D.J., Timans, P.J., Smith, D., Williams, D.A., McMahon, R.A., Ahmed, H.
Published in Microelectronic engineering (1988)
Published in Microelectronic engineering (1988)
Get full text
Journal Article