Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer
Cai, Shengran, Li, Wei, Zou, Hongshuo, Bao, Haifei, Zhang, Kun, Wang, Jiachou, Song, Zhaohui, Li, Xinxin
Published in Micromachines (Basel) (29.03.2019)
Published in Micromachines (Basel) (29.03.2019)
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Journal Article
A silicon integrated micro nano-positioning XY-stage for nano-manipulation
Sun, Lining, Wang, Jiachou, Rong, Weibin, Li, Xinxin, Bao, Haifei
Published in Journal of micromechanics and microengineering (01.12.2008)
Published in Journal of micromechanics and microengineering (01.12.2008)
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Journal Article
Friction and wear properties in MEMS
Wang, Weiyuan, Wang, Yuelin, Bao, Haifei, Xiong, Bin, Bao, Minhang
Published in Sensors and actuators. A, Physical (01.04.2002)
Published in Sensors and actuators. A, Physical (01.04.2002)
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Journal Article
Conference Proceeding
A simple estimation of transverse response of high-g accelerometers by a free-drop-bar method
Bao, Haifei, Song, Zhaohui, Lu, Deren, Li, Xinxin
Published in Microelectronics and reliability (01.01.2009)
Published in Microelectronics and reliability (01.01.2009)
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Journal Article
AFM probes fabricated with masked–maskless combined anisotropic etching and p+ surface doping
Han, Jianqiang, Li, Xinxin, Bao, Haifei, Zuo, Guomin, Wang, Yuelin, Feng, Fei, Yu, Zhenyin, Ge, Xiaohong
Published in Journal of micromechanics and microengineering (01.02.2006)
Published in Journal of micromechanics and microengineering (01.02.2006)
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Journal Article
Nano-mechanical electro-thermal probe array used for high-density storage based on NEMS technology
Yang, Zunxian, Yu, Ying, Li, Xinxin, Bao, Haifei
Published in Microelectronics and reliability (01.05.2006)
Published in Microelectronics and reliability (01.05.2006)
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Journal Article
Monolithic tri-axis cantilever high-shock accelerometers fabricated with a single-sided process in (111) wafers
Hongshuo Zou, Jiachou Wang, Fang Chen, Haifei Bao, Xinxin Li
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
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Conference Proceeding
MEMS monolithic tri-axis high-shock accelerometers with MHz-level ultra-high resonant frequency
Hongshuo Zou, Fang Chen, Jiachou Wang, Haifei Bao, Xinxin Li
Published in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2017)
Published in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2017)
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Conference Proceeding
Monolithically integrated tri-axis shock accelerometers with MHz-level high resonant-frequency
Zou, Hongshuo, Wang, Jiachou, Chen, Fang, Bao, Haifei, Jiao, Ding, Zhang, Kun, Song, Zhaohui, Li, Xinxin
Published in Journal of micromechanics and microengineering (01.07.2017)
Published in Journal of micromechanics and microengineering (01.07.2017)
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Journal Article
High-performance monolithic triaxial piezoresistive shock accelerometers
Dong, Peitao, Li, Xinxin, Yang, Heng, Bao, Haifei, Zhou, Wei, Li, Shengyi, Feng, Songlin
Published in Sensors and actuators. A. Physical. (15.02.2008)
Published in Sensors and actuators. A. Physical. (15.02.2008)
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Journal Article
High-yield fabrication of AFM probes with simultaneous formation of both nano-tips and cantilever
Jianqiang Han, Xinxin Li, Haifei Bao, Yuelin Wang, Bin Liu, Xiaohong Ge
Published in IEEE Sensors, 2005 (2005)
Published in IEEE Sensors, 2005 (2005)
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Conference Proceeding
Micro/NANO-Friction and Thermal-Mechanical Properties of Polymer Thin-Film Investigated with an Integrated SPM Probe Array
Haifei Bao, Bin Liu, Xinxin Li
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2007)
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2007)
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Conference Proceeding
A Front-Side Fabricated Monolithic 5000g-/100000g-Measured Range Composite Shock Accelerometers with Small Chip-Size, High Resonant Frequency and Ultra-High Anti-overload Capacity
Zheng, Mengyao, Bao, Haifei, Wang, Jiachou, Li, Xinxin
Published in 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (21.01.2024)
Published in 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (21.01.2024)
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Conference Proceeding
A novel monolithically integrated pressure, accelerometer and temperature composite sensor
Quan Wang, Xinxin Li, Tie Li, Minhang Bao, Kun Zhang, Xiaohong Ge, Wei Zhou, Haifei Bao
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2009)
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2009)
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Conference Proceeding
Integrated SPM probes with NEMS technology
Li, Xinxin, Han, Jianqiang, Bao, Haifei, Yang, Zunxian
Published in Sensors and actuators. A. Physical. (12.02.2007)
Published in Sensors and actuators. A. Physical. (12.02.2007)
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Journal Article
A Single-Wafer-Processed XY-Stage Fabricated with Trench-sidewall Doping and Refilled-Trench Isolating Technology
Lei Gu, Xinxin Li, Haifei Bao, Bin Liu, Yuelin Wang, Min Liu, Zunxian Yang, Baoluo Cheng
Published in 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems (01.01.2006)
Published in 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems (01.01.2006)
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Conference Proceeding