Search Results - "Banine, Vadim Y." :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Investigation of ion energy distribution functions in EUV-induced plasmas by ion mass spectrometry

Investigation of ion energy distribution functions in EUV-induced plasmas by ion mass spectrometry

by van de Ven, Tijn H. M., Reefman, Pim, Osorio, Edgar A., Banine, Vadim Y., Beckers, Job
Published in 2016 IEEE International Conference on Plasma Science (ICOPS) (01.06.2016)

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Conference Proceeding

RADIATION SOURCE FOR USE IN LITHOGRAPHIC PROJECTION APPARATUS

RADIATION SOURCE FOR USE IN LITHOGRAPHIC PROJECTION APPARATUS

by BARTNIK ANDRZEJ, FIEDOROWICZ HENRYK, BANINE VADIM Y, KOSHELEV KONSTANTIN NICOLLAEBICHI, BIJKERK FREDERIK, DE BRUIJN CORNELIS C
Year of Publication 07.07.2001

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Patent

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

by Banine, Vadim Y, Jonkers, Jeroen
Year of Publication 02.03.2010

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Patent

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

by JONKERS JEROEN, BANINE VADIM Y
Year of Publication 02.03.2010

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Patent

Integrating waveguide for use in lithographic projection apparatus

Integrating waveguide for use in lithographic projection apparatus

by Banine, Vadim Y
Year of Publication 24.09.2002

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Patent

Integrating waveguide for use in lithographic projection apparatus

Integrating waveguide for use in lithographic projection apparatus

by BANINE VADIM Y
Year of Publication 24.09.2002

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Patent

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

by Banine, Vadim Y, Jonkers, Jeroen
Year of Publication 30.03.2004

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Patent

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

by JONKERS JEROEN, BANINE VADIM Y
Year of Publication 30.03.2004

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Patent

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

by JONKERS JEROEN, BANINE VADIM Y
Year of Publication 02.05.2002

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Patent

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

by JONKERS JEROEN, BANINE VADIM Y
Year of Publication 02.05.2002

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by JOSEPHINA MOORS JOHANNES H, BANINE VADIM Y
Year of Publication 17.11.2005

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by BANINE VADIM Y.,JOSEPHINA MOORS JOHANNES H
Year of Publication 16.11.2005

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Patent

Method of and apparatus for supplying a dynamic protective layer to a mirror

Method of and apparatus for supplying a dynamic protective layer to a mirror

by BANINE VADIM Y, BAKKER LEVINUS P
Year of Publication 09.06.2005

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by BLEEKER ARNO J, BANINE VADIM Y
Year of Publication 02.06.2005

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Patent

Method for cleaning a lithographic apparatus module, cleaning arrangement for a lithographic apparatus module and lithographic apparatus comprising the cleaning arrangement

Method for cleaning a lithographic apparatus module, cleaning arrangement for a lithographic apparatus module and lithographic apparatus comprising the cleaning arrangement

by FRERIKS JOHANNES M, IVANOV VLADIMIR V, BANINE VADIM Y
Year of Publication 28.06.2007

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Patent

Lithographic apparatus having a contaminant trapping system, a contamination trapping system, a device manufacturing method, and a method for improving trapping of contaminants in a lithographic apparatus

Lithographic apparatus having a contaminant trapping system, a contamination trapping system, a device manufacturing method, and a method for improving trapping of contaminants in a lithographic apparatus

by WASSINK ARNOUD, BANINE VADIM Y, BAKKER LEVINUS P
Year of Publication 23.03.2006

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Patent

Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation

Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation

by IVANOV VLADIMIR V.,BANINE VADIM Y.,KOSHELEV KONSTANTIN N
Year of Publication 15.06.2005

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Patent

Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation

Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation

by IVANOV VLADIMIR V, BANINE VADIM Y, KOSHELEV KONSTANTIN N
Year of Publication 09.06.2005

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by JOSEPHINA MOORS JOHANNES H, BANINE VADIM Y
Year of Publication 20.10.2010

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Patent

Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby

Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby

by SCHUURMANS FRANK J.P, BANINE VADIM Y, BAKKER LEVINUS P
Year of Publication 12.05.2005

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Patent