EUV-Induced Plasma: A Peculiar Phenomenon of a Modern Lithographic Technology
Beckers, Job, van de Ven, Tijn, van der Horst, Ruud, Astakhov, Dmitry, Banine, Vadim
Published in Applied sciences (15.07.2019)
Published in Applied sciences (15.07.2019)
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Journal Article
EUV-induced hydrogen plasma and particle release
van de Kerkhof, Mark, Yakunin, Andrei M., Kvon, Vladimir, Nikipelov, Andrey, Astakhov, Dmitry, Krainov, Pavel, Banine, Vadim
Published in Radiation effects and defects in solids (03.06.2022)
Published in Radiation effects and defects in solids (03.06.2022)
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Journal Article
Investigation of ion energy distribution functions in EUV-induced plasmas by ion mass spectrometry
van de Ven, Tijn H. M., Reefman, Pim, Osorio, Edgar A., Banine, Vadim Y., Beckers, Job
Published in 2016 IEEE International Conference on Plasma Science (ICOPS) (01.06.2016)
Published in 2016 IEEE International Conference on Plasma Science (ICOPS) (01.06.2016)
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Conference Proceeding
멤브레인 세정 장치
SBRIZZAI FABIO, BANINE VADIM YEVGENYEVICH, NIKIPELOV ANDREY, DE VRIES GOSSE CHARLES, NIENHUYS HAN KWANG, BLOM SANDER
Year of Publication 23.06.2022
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Year of Publication 23.06.2022
Patent
MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS COMPRISING SUCH A MEMBRANE
BOOGAARD ARJEN, SCACCABAROZZI LUIGI, BANINE VADIM YEVGENYEVICH, PETER MARIA, DHALLUIN FLORIAN DIDIER ALBIN, KUZNETSOV ALEXEY SERGEEVICH, NIKIPELOV ANDREY ALEXANDROVICH, VAN ZWOL PIETER JAN, BENSCHOP JOZEF PETRUS HENRICUS, VAN DER ZANDE WILLEM JOAN, YAKUNIN ANDREI MIKHAILOVICH
Year of Publication 22.03.2024
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Year of Publication 22.03.2024
Patent
MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS COMPRISING SUCH A MEMBRANE
BOOGAARD ARJEN, SCACCABAROZZI LUIGI, BANINE VADIM YEVGENYEVICH, PETER MARIA, DHALLUIN FLORIAN DIDIER ALBIN, KUZNETSOV ALEXEY SERGEEVICH, NIKIPELOV ANDREY ALEXANDROVICH, VAN ZWOL PIETER JAN, BENSCHOP JOZEF PETRUS HENRICUS, VAN DER ZANDE WILLEM JOAN, YAKUNIN ANDREI MIKHAILOVICH
Year of Publication 24.11.2023
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Year of Publication 24.11.2023
Patent
리소그래피 장치에서 사용하기 위한 미러
YAGHOOBI PARHAM, BANINE VADIM YEVGENYEVICH, NIKIPELOV ANDREY, VAN DE KERKHOF MARCUS ADRIANUS, MOORS JOHANNES HUBERTUS JOSEPHINA
Year of Publication 21.01.2022
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Year of Publication 21.01.2022
Patent
MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS COMPRISING SUCH A MEMBRANE
BOOGAARD ARJEN, SCACCABAROZZI LUIGI, BANINE VADIM YEVGENYEVICH, PETER MARIA, DHALLUIN FLORIAN DIDIER ALBIN, KUZNETSOV ALEXEY SERGEEVICH, NIKIPELOV ANDREY ALEXANDROVICH, VAN ZWOL PIETER JAN, BENSCHOP JOZEF PETRUS HENRICUS, VAN DER ZANDE WILLEM JOAN, YAKUNIN ANDREI MIKHAILOVICH
Year of Publication 04.08.2023
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Year of Publication 04.08.2023
Patent
리소그래피 장치
BANINE VADIM YEVGENYEVICH, NIKIPELOV ANDREY, VAN DE KERKHOF MARCUS ADRIANUS, MOORS JOHANNES HUBERTUS JOSEPHINA, ACHANTA SATISH, JANSSENS STEF MARTEN JOHAN
Year of Publication 11.03.2022
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Year of Publication 11.03.2022
Patent
MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS COMPRISING SUCH A MEMBRANE
BOOGAARD ARJEN, SCACCABAROZZI LUIGI, BANINE VADIM YEVGENYEVICH, PETER MARIA, DHALLUIN FLORIAN DIDIER ALBIN, KUZNETSOV ALEXEY SERGEEVICH, NIKIPELOV ANDREY ALEXANDROVICH, VAN ZWOL PIETER JAN, BENSCHOP JOZEF PETRUS HENRICUS, VAN DER ZANDE WILLEM JOAN, YAKUNIN ANDREI MIKHAILOVICH
Year of Publication 06.09.2022
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Year of Publication 06.09.2022
Patent
세정 장치 및 방법
BANINE VADIM YEVGENYEVICH, NIKIPELOV ANDREY, VAN DE KERKHOF MARCUS ADRIANUS, KUZNETSOV ALEXEY SERGEEVICH, BYSTROV KIRILL, SCHUH NADJA
Year of Publication 25.06.2020
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Year of Publication 25.06.2020
Patent
리소그래피 장치용 펠리클 멤브레인
BALTUSSEN SANDER, VAN DER WOORD TIES WOUTER, VAN DE KERKHOF MARCUS ADRIANUS, DONMEZ NOYAN INCI, BANINE VADIM YEVGENYEVICH, HOUWELING ZOMER SILVESTER, VERMEULEN PAUL ALEXANDER, NIKIPELOV ANDREY, DOLGOV ALEXANDR, VORONINA VICTORIA, VLES DAVID FERDINAND, YEGEN HALIL GOKAY, NOTENBOOM ARNOUD WILLEM
Year of Publication 18.04.2022
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Year of Publication 18.04.2022
Patent
LITHOGRAPHIC APPARATUS AND METHOD
VAN DER SCHOOT HARMEN, YAKUNIN ANDREI, BANINE VADIM, LOOPSTRA ERIK, VAN KAMPEN MAARTEN, STEVENS LUCAS
Year of Publication 16.04.2019
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Year of Publication 16.04.2019
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미립자 파편의 궤적을 변경하기 위한 편향 장치를 구비한 리소그래피 시스템
NENCHEV GEORGI NENCHEV, VAN DE KERKHOF MARCUS ADRIANUS, JACOBS JOHANNES HENRICUS WILHELMUS, MOORS JOHANNES HUBERTUS JOSEPHINA, UZGOREN ERAY, BAL KURSAT, HUANG YANG SHAN, RANJAN MANISH, DE VRIES SJOERD FRANS, ALBRIGHT RONALD PETER, YAGHOOBI PARHAM, BANINE VADIM YEVGENYEVICH, HUANG ZHUANGXIONG, NIKIPELOV ANDREY, BRULS RICHARD JOSEPH, RAASVELD THOMAS MAARTEN, FRIJNS OLAV WALDEMAR VLADIMIR, UMSTADTER KARL ROBERT, TE SLIGTE EDWIN
Year of Publication 27.09.2022
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Year of Publication 27.09.2022
Patent
LITHOGRAPHIC APPARATUS AND METHOD
VAN DER SCHOOT HARMEN, YAKUNIN ANDREI, BANINE VADIM, LOOPSTRA ERIK, VAN KAMPEN MAARTEN, STEVENS LUCAS
Year of Publication 28.03.2018
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Year of Publication 28.03.2018
Patent
계측 방법, 방사선 소스, 계측 장치 및 디바이스 제조 방법
VERSCHUREN COEN ADRIANUS, BANINE VADIM YEVGENYEVICH, POLYAKOV ALEXEY OLEGOVICH, QUINTANILHA RICHARD
Year of Publication 21.03.2018
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Year of Publication 21.03.2018
Patent
LITHOGRAPHIC APPARATUS AND METHOD
VAN DER SCHOOT HARMEN, YAKUNIN ANDREI, BANINE VADIM, LOOPSTRA ERIK, VAN KAMPEN MAARTEN, STEVENS LUCAS
Year of Publication 28.02.2018
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Year of Publication 28.02.2018
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