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Year of Publication 31.01.2024
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Year of Publication 10.11.2022
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Year of Publication 15.05.2023
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Year of Publication 05.12.2023
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리소그래피 시뮬레이션 및 광학 근접 보정
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Year of Publication 24.05.2022
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Year of Publication 24.05.2022
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Photoresist patterning process
Bangar, Mangesh Ashok, Dai, Huixiong, Nemani, Srinivas D, Yieh, Ellie Y, Welch, Steven Hiloong
Year of Publication 10.09.2024
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Year of Publication 10.09.2024
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LITHOGRAPHY PROCESS WINDOW ENHANCEMENT FOR PHOTORESIST PATTERNING
BANGAR, Mangesh Ashok, YIEH, Ellie Y, NGAI, Christopher S, NEMANI, Srinivas D, DAI, Huixiong
Year of Publication 24.04.2024
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Year of Publication 24.04.2024
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VACUUM BAKE FOR EUV LITHOGRAPHY
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Year of Publication 14.03.2024
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Year of Publication 14.03.2024
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VACUUM BAKE FOR EUV LITHOGRAPHY
BANGAR, Mangesh Ashok, YIEH, Ellie Y, LUBOMIRSKY, Dmitry, NEMANI, Srinivas D, DAI, Huixiong, HSU, Chih-An
Year of Publication 14.03.2024
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Year of Publication 14.03.2024
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Lithography process window enhancement for photoresist patterning
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Year of Publication 27.02.2024
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Year of Publication 27.02.2024
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Film structure for electric field guided photoresist patterning process
Bangar, Mangesh Ashok, Ngai, Christopher S, Dai, Huixiong, Nemani, Srinivas D, Yieh, Ellie Y, Welch, Steven Hiloong
Year of Publication 23.01.2024
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Year of Publication 23.01.2024
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LITHOGRAPHY PROCESS WINDOW ENHANCEMENT FOR PHOTORESIST PATTERNING
BANGAR, Mangesh Ashok, YIEH, Ellie Y, NGAI, Christopher S, NEMANI, Srinivas D, DAI, Huixiong
Year of Publication 25.01.2023
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Year of Publication 25.01.2023
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LITHOGRAPHY PROCESS WINDOW ENHANCEMENT FOR PHOTORESIST PATTERNING
BANGAR, Mangesh Ashok, YIEH, Ellie Y, NGAI, Christopher S, NEMANI, Srinivas D, DAI, Huixiong
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
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METAL OXIDE RESIST PATTERNING WITH ELECTRICAL FIELD GUIDED POST-EXPOSURE BAKE
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Year of Publication 15.12.2022
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Year of Publication 15.12.2022
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METAL OXIDE RESIST PATTERNING WITH ELECTRICAL FIELD GUIDED POST-EXPOSURE BAKE
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Year of Publication 08.12.2022
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Year of Publication 08.12.2022
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Lithography process window enhancement for photoresist patterning
Bangar, Mangesh Ashok, Ngai, Christopher S, Dai, Huixiong, Nemani, Srinivas D, Yieh, Ellie Y
Year of Publication 30.08.2022
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Year of Publication 30.08.2022
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FILM STRUCTURE FOR ELECTRIC FIELD GUIDED PHOTORESIST PATTERNING PROCESS
BANGAR, Mangesh Ashok, YIEH, Ellie Y, NGAI, Christopher S, WELCH, Steven Hiloong, NEMANI, Srinivas D, DAI, Huixiong
Year of Publication 20.07.2023
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Year of Publication 20.07.2023
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LITHOGRAPHY SIMULATION AND OPTICAL PROXIMITY CORRECTION
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Year of Publication 04.10.2023
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Year of Publication 04.10.2023
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PHOTORESIST PATTERNING PROCESS
BANGAR, Mangesh Ashok, YIEH, Ellie Y, WELCH, Steven Hiloong, NEMANI, Srinivas D, DAI, Huixiong
Year of Publication 23.09.2021
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Year of Publication 23.09.2021
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LITHOGRAPHY PROCESS WINDOW ENHANCEMENT FOR PHOTORESIST PATTERNING
BANGAR, Mangesh Ashok, YIEH, Ellie Y, NGAI, Christopher S, NEMANI, Srinivas D, DAI, Huixiong
Year of Publication 23.09.2021
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Year of Publication 23.09.2021
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