입자 측정 장치 및 입자 측정 방법
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Year of Publication 08.01.2020
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PARTICLE MEASURING DEVICE AND METHOD FOR MEASURING PARTICLES
KONDO IKU, TABUCHI TAKUYA, KATO HARUHISA, BANDO KAZUNA, MATSUURA YUSUKE
Year of Publication 15.11.2018
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Year of Publication 15.11.2018
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PARTICLE MEASUREMENT METHOD AND DETECTION LIQUID
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Year of Publication 10.09.2020
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Year of Publication 10.09.2020
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PARTICLE MEASURING DEVICE AND PARTICLE MEASURING METHOD
KONDO, Kaoru, KATO, Haruhisa, MATSUURA, Yusuke, TABUCHI, Takuya, BANDO, Kazuna
Year of Publication 18.10.2018
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Year of Publication 18.10.2018
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Real Time Measurement of Exact Size and Refractive Index of Particles in Liquid by Flow Particle Tracking Method
Tabuchi, Takuya, Bando, Kazuna, Kondo, Sota, Tomita, Hiroshi, Shiobara, Eishi, Hayashi, Hidekazu, Kato, Haruhisa, Matsuura, Yusuke, Nakamura, Ayako, Kondo, Kaoru
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
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Conference Proceeding
PARTICLE MEASURING DEVICE AND PARTICLE MEASURING METHOD
KONDO, Kaoru, KATO, Haruhisa, MATSUURA, Yusuke, TABUCHI, Takuya, BANDO, Kazuna
Year of Publication 04.10.2023
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Year of Publication 04.10.2023
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Particle measuring device and particle measuring method
Tabuchi, Takuya, Bando, Kazuna, Kato, Haruhisa, Matsuura, Yusuke, Kondo, Kaoru
Year of Publication 17.11.2020
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Year of Publication 17.11.2020
Patent